Varian Turbo-V 301 Navigator Turbomolecular Pump
The Varian Turbo-V 301 Navigator is a highly efficient, mid-capacity turbomolecular pump engineered for clean, high-performance high and ultra-high vacuum (UHV) applications. It features Varian's proprietary MacroTorr dynamic staging—incorporating 8 bladed turbine stages followed by 3 specialized molecular drag discs machined from a single block of high-strength aluminum alloy. This unique staging design delivers industry-leading compression ratios for light gases and a high continuous foreline backing pressure tolerance up to 8 mbar.
This exact part number (9698918) is configured with a DN 100 ISO-K high-vacuum inlet flange and a standard manual thumbscrew vent valve. Utilizing permanently lubricated, high-precision ceramic ball bearings installed strictly on the fore-vacuum side, the pump operates entirely free of hydrocarbon contaminating agents, making it ideal for contamination-sensitive analytical and semiconductor environments.
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Part Number (MPN): 9698918 / 969-8918
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Model Configuration: Turbo-V 301 Navigator (TV 301 NAV)
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High Vacuum Inlet Flange: DN 100 ISO-K
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Fore-Vacuum / Exhaust Flange: KF16 NW
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Drive Electronics Profile: Designed for direct connection to Varian TV 301 Navigator onboard "brick" controllers or remote rack-mount units.
Key Features & Benefits
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MacroTorr Drag Technology: Maximizes light gas transport, allowing the system to achieve deep UHV performance while exhausting into compact backing setups.
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Maintenance-Free Ceramic Bearings: Features permanently lubricated high-precision ceramic ball bearings that eliminate oil reservoirs, wicks, and the risk of oil back-streaming.
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Arbitrary Orientation Mounting: Excellent structural balancing and preloaded internal suspension allow the pump to be operated in any installation angle.
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Low Vibration Execution: Rigorous automated factory balancing limits residual vibration displacement to less than 0.01 μm at the inlet flange, protecting sensitive analytical detectors.
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Thermal Safeguards: Equipped with an integrated thermistor sensor mounted adjacent to the upper bearing to actively protect against system overheating.
Technical Specifications
| Parameter | Specification |
|---|---|
| Pumping Speed (N2) | 250 l/s |
| Pumping Speed (He / H2) | 220 l/s / 200 l/s |
| Nominal Rotation Speed | 56,000 rpm |
| Ultimate Pressure (Mechanical Backed) | < 2×10−10 mbar (< 1.5×10−10 Torr) |
| Compression Ratio (N2) | > 2×108 (8×108 nominal) |
| Compression Ratio (He / H2) | 1×105 / 2×104 |
| Max Continuous Foreline Pressure | 8.0 mbar |
| Ramp-Up / Start Time | < 3.0 minutes |
| Motor Driving Voltage | 54 V AC (3-Phase, 933 Hz) |
| Cooling Profile | Natural Convection (Forced Air or Water optional) |
| Sound / Noise Level | ≤ 45 dB(A) at 1 meter |
| Weight | 4.5 kg (10.0 lbs) |
Typical Applications
The 250 l/s capacity and clean background pressure of the TV 301 make it a standard choice across heavy industry and high-end core labs:
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Analytical Instrumentation: High-vacuum stages for LC-MS, GC-MS, Electron Microscopy (SEM/TEM), and Focused Ion Beam (FIB) tools.
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Semiconductor & Thin Film: R&D deposition, surface analysis systems, plasma monitoring windows, and load lock chambers.
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High-Energy Physics: Particle accelerators, UHV transfer lines, and beamline instrumentation loops.
- Regular price
- $5,239.00
- Sale price
- $5,239.00
- Regular price
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- Unit price
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