Varian / Agilent Turbo-V 551 Navigator Turbomolecular Pump
The Varian / Agilent Turbo-V 551 Navigator (frequently referred to in system configurations as the 551/511 series class) is a highly reliable, medium-capacity turbomolecular vacuum pump engineered for demanding industrial processes, semiconductor environments, and high-precision scientific research. Delivering a robust pumping speed of up to 550 L/sfor Nitrogen (N2), this pump provides a thoroughly clean, hydrocarbon-free high to ultra-high vacuum environment.
The Turbo-V 551 utilizes Varian’s industry-proven permanently lubricated ceramic ball bearings on the foreline side, integrated seamlessly with proprietary Macrotorr stages. This optimized layout allows the pump to sustain exceptionally high foreline/backing pressure limits and massive gas throughputs, minimizing requirements on your backing pump. Machined from a rigid monoblock alloy to withstand potential atmospheric shocks, it offers an exceptionally high Mean Time To Failure (MTTF) for critical uptime applications.
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High-Efficiency Macrotorr Stages: Delivers unmatched compression ratios for light gases, ensuring ultimate pressure depth while managing high backing pressures.
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Hydrocarbon-Free Delivery: Maintenance-free, permanently lubricated ceramic bearings eliminate oil reservoirs and prevent oil backstreaming into the chamber.
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Monoblock Rotor Engineering: Advanced structural integrity allows the turbine blades to maintain stability under sudden gas bursts or mechanical impacts.
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Multi-Orientation Mounting: Designed to operate smoothly and safely at any physical angle or mounting orientation.
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Integrated Safety Sensors: Features an onboard upper-bearing thermal sensor to constantly monitor core temperatures and protect against critical tool failures.
Technical Specifications
| Parameter | Specification |
|---|---|
| Manufacturer | Varian Vacuum Technologies / Agilent Technologies |
| Model Class | Turbo-V 551 / 511 Navigator Series |
| Common Part Numbers | 969-8921 (ISO 160) | 969-8922 (CF 8") | 969-8923 (ISO 100) |
| Pumping Speed (N2) | 550 L/s (with ISO 160 or CF 8") | $350\text{ L/s (with ISO 100 constraint) |
| Pumping Speed (He / H2) | 600 l/s / 450 l/s |
| Compression Ratio | 1×109 (N2) | $1 \times 10^ ($H) | $1 \times 10 (($H) |
| Ultimate Base Pressure | <1×10−10 mbar (<1×10−10 Torr) |
| Foreline Connection Flange | DN 25 ISO-KF (NW25) |
| Nominal Rotational Speed | 42,000 RPM |
| Ramp-Up / Start Time | <3 minutes |
| Cooling Options | Forced Air (Convection Fan) or Integrated Water-Cooling blocks |
| Power Requirements | Driven via 3-phase, high-frequency Navigator inverter supply |
| Weight | 15.5 kg (34.1 lbs for basic ISO 160 variant) |
Applications & Tool Integration
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Semiconductor Manufacturing (Etch, PVD, CVD, Metrology tools)
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Dedicated Mass Spectrometry & Analytical Gauges
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UHV Physics Chambers, Beamlines, and Thin-Film Research
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Space and Altitude Simulation Chambers
- Regular price
- $5,199.00
- Sale price
- $5,199.00
- Regular price
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- Unit price
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