Varian

Varian / Agilent Turbo-V 551 Navigator Turbomolecular Pump

Part Number: 9698924
Condition: Refurbished
In Stock

The Varian / Agilent Turbo-V 551 Navigator (frequently referred to in system configurations as the 551/511 series class) is a highly reliable, medium-capacity turbomolecular vacuum pump engineered for demanding industrial processes, semiconductor environments, and high-precision scientific research. Delivering a robust pumping speed of up to 550 L/sfor Nitrogen (), this pump provides a thoroughly clean, hydrocarbon-free high to ultra-high vacuum environment.

The Turbo-V 551 utilizes Varian’s industry-proven permanently lubricated ceramic ball bearings on the foreline side, integrated seamlessly with proprietary Macrotorr stages. This optimized layout allows the pump to sustain exceptionally high foreline/backing pressure limits and massive gas throughputs, minimizing requirements on your backing pump. Machined from a rigid monoblock alloy to withstand potential atmospheric shocks, it offers an exceptionally high Mean Time To Failure (MTTF) for critical uptime applications.

  • High-Efficiency Macrotorr Stages: Delivers unmatched compression ratios for light gases, ensuring ultimate pressure depth while managing high backing pressures.

  • Hydrocarbon-Free Delivery: Maintenance-free, permanently lubricated ceramic bearings eliminate oil reservoirs and prevent oil backstreaming into the chamber.

  • Monoblock Rotor Engineering: Advanced structural integrity allows the turbine blades to maintain stability under sudden gas bursts or mechanical impacts.

  • Multi-Orientation Mounting: Designed to operate smoothly and safely at any physical angle or mounting orientation.

  • Integrated Safety Sensors: Features an onboard upper-bearing thermal sensor to constantly monitor core temperatures and protect against critical tool failures.

Technical Specifications

Parameter Specification
Manufacturer Varian Vacuum Technologies / Agilent Technologies
Model Class Turbo-V 551 / 511 Navigator Series
Common Part Numbers 969-8921 (ISO 160) | 969-8922 (CF 8") | 969-8923 (ISO 100)
Pumping Speed () 550 L/s (with ISO 160 or CF 8") | $350\text{ L/s (with ISO 100 constraint)
Pumping Speed ( / ) /
Compression Ratio () | $1 \times 10^ ($H) | $1 \times 10 (($H)
Ultimate Base Pressure ()
Foreline Connection Flange DN 25 ISO-KF (NW25)
Nominal Rotational Speed
Ramp-Up / Start Time
Cooling Options Forced Air (Convection Fan) or Integrated Water-Cooling blocks
Power Requirements Driven via 3-phase, high-frequency Navigator inverter supply
Weight ( for basic ISO 160 variant)

Applications & Tool Integration

  • Semiconductor Manufacturing (Etch, PVD, CVD, Metrology tools)

  • Dedicated Mass Spectrometry & Analytical Gauges

  • UHV Physics Chambers, Beamlines, and Thin-Film Research

  • Space and Altitude Simulation Chambers

Regular price
$5,199.00
Sale price
$5,199.00
Regular price
Shipping calculated at checkout.
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