Shimadzu TMP-3203 Turbo Molecular Pump

This Shimadzu TMP-3203 turbo molecular pump is a powerful and versatile vacuum solution designed for demanding high-vacuum applications. Featuring advanced magnetic levitation technology, it offers superior pumping speeds, oil-free operation, and exceptional reliability for use in semiconductor manufacturing, research, and industrial processes.

Key Features:

• Magnetic Levitation (MagLev) Technology: Eliminates mechanical wear and contamination by levitating the rotor, ensuring an oil-free vacuum and extremely low vibration levels (typically $<0.01$ µm single amplitude), leading to extended pump life and minimal maintenance.

• High Pumping Speed: Delivers an impressive pumping speed of 3200 l/s for N₂, and high speeds for He (3000 l/s) and H₂ (2400 l/s), enabling rapid evacuation of large volumes and high-throughput processes.

• Corrosion Resistant Variants (LMC): Available in LMC configurations with specialized coatings for enhanced resistance to aggressive process gases, suitable for semiconductor etching and deposition applications.

• High Reliability: Engineered for robust performance and continuous operation in demanding industrial environments.

• Versatile Installation: Designed to be mounted in any orientation, offering flexibility in system design.

• Controller (EI-D3203M): Often paired with a dedicated Shimadzu controller (like the EI-D3203M) for optimized operation, monitoring, and diagnostics. (Note: This listing assumes the pump is offered with or without a controller; please specify if a controller is included.)

• Safety Features: Incorporates battery-less operation with regenerated power for safe rotor touchdown during power failures, and advanced diagnostic functions.

Specifications: