Shimadzu

Shimadzu TMP-303LMC (A1) Magnetically Levitated Turbomolecular Pump

Name: Shimadzu TMP-303LMC (A1) Magnetically Levitated Turbomolecular Pump
Brand: Shimadzu
Price: 6499.00 USD
Availability: InStock

Part Number: TMP303LMCA1

Condition: Refurbished

In Stock

The Shimadzu TMP-303LMC (A1) is a high-throughput, magnetically levitated turbomolecular vacuum pump engineered specifically to handle both clean R&D processes and aggressive corrosive gas loads. Featuring an advanced 5-axis active magnetic bearing suspension system, this pump completely eliminates mechanical friction, oil lubrication, and the risk of hydrocarbon back-streaming, ensuring an ultra-pure, contamination-free vacuum environment.

The "LMC" designation indicates that this model is equipped with specialized anti-corrosion rotor coatings (typically nickel plating), making it exceptionally durable against highly reactive chemical processes used in semiconductor manufacturing, plasma etching, CVD, and thin-film deposition.

Active Magnetic Bearings: 5-axis levitation prevents contact wear, eliminates routine bearing maintenance, and ensures zero chemical degradation of lubricants.
Corrosive Gas Protection: Nickel-plated rotor blades and internal structural shielding resist chemical attack from aggressive process gases.
High Pumping Throughput: Delivers consistent, class-leading pumping speeds up to 320 L/s for Nitrogen ( $N_2$ ).
Flexible Mounting Configuration: The absence of a liquid oil reservoir allows the pump to be mounted and operated in any physical orientation.
Ultra-Low Vibration: Active position sensors continually balance the rotor dynamically, keeping mechanical harmonics to an absolute minimum.

Technical Specifications

Parameter	Specification
Manufacturer	Shimadzu Corporation (Japan)
Model Number	TMP-303LMC (Revision A1 Variant)
Pumping Speed ( $N_2$ )	$320\text{ L/s}$ ( $300\text{ L/s}$ with protective net screen installed)
Pumping Speed ( $He$ / $H_2$ )	$340\text{ L/s}$ / $320\text{ L/s}$
High-Vacuum Inlet Flange Options	VG100 / ICF152 / ISO 100-B / ISO 100-C
Foreline / Backing Connection	DN 25 KF (NW25)
Compression Ratio ( $N_2$ )	$1 \times 10^9$
Ultimate Pressure	$\le 10^{-7}\text{ Pa}$ order (Corrosive series baseline)
Rated Speed	$45,000\text{ RPM}$
Start-up / Ramp-up Time	$\le 5\text{ minutes}$
Cooling Method	Water Cooled ( $1$ to $3\text{ L/min}$ flow rate requirement)
Purge Gas Flow Rate	Recommended $20$ to $30\text{ mL/min}$ ( $SCCM$ )
Compatible Controllers	Shimadzu EI-S04M / EI-D303M power supply units
Weight	$14\text{ kg}$ ( $31.0\text{ lbs}$ )