Shimadzu TMP-2203LM Series Magnetically Levitated Turbo Molecular Pump
The Shimadzu TMP-2203 Series represents cutting-edge vacuum technology, featuring advanced magnetic levitation and exceptional pumping performance in a compact design. This ultra-quiet, high-throughput turbo molecular pump delivers superior reliability for demanding semiconductor manufacturing, research, and industrial applications. With its corrosion-resistant construction and intelligent monitoring capabilities, the TMP-2203 ensures consistent performance while minimizing maintenance requirements.
|
Specification |
Details |
|
Pumping Speed (N₂) |
2140 L/s |
|
Pumping Speed (He) |
2000 L/s |
|
Pumping Speed (H₂) |
1350 L/s |
|
Ultimate Pressure |
10⁻⁸ Pa (LM model) / 10⁻⁷ Pa (LMC model) |
|
Maximum Inlet Pressure |
40 Pa |
|
Maximum Outlet Pressure |
270 Pa |
|
Rated Speed |
24,600 rpm |
|
Start-up Time |
11 minutes |
|
Inlet Flange |
VG250 / ICF305 / ISO250B |
|
Outlet Flange |
KF40 |
|
Cooling Method |
Water cooling |
|
Water Flow Rate |
1 to 3 L/min |
|
Water Pressure |
0.2 to 0.5 MPa |
|
Water Temperature |
5 to 30°C |
|
Operating Temperature |
0 to 40°C |
|
Bake-out Temperature |
120°C max |
|
Vibration Level |
0.01 µm or less |
|
Weight |
59 kg |
|
Power Supply |
200-240 VAC ±10% (50/60 Hz) |
|
Maximum Power |
1.2 kVA |
|
Communication |
RS-232C, RS-485 |
|
Speed Control Range |
25-100% variable |
- Regular price
- $13,980.00
- Sale price
- $13,980.00
- Regular price
-
$222.00
