Shimadzu

Shimadzu EI-R04M Turbomolecular Pump Controller

Part Number: EIR04M
Condition: Refurbished
In Stock

The Shimadzu EI-R04M is a specialized digital drive controller designed to operate Shimadzu's EI-series magnetically levitated turbomolecular pumps. Featuring a 5-axis active magnetic bearing suspension system, it manages rotor levitation, motor speed, and dynamic balance without physical contact or oil lubrication. Built with robust protective logic against power fluctuations, rotor imbalance, and thermal overloads, the EI-R04M ensures clean, vibration-free, and high-stability performance for semiconductor fabrication tools and ultra-high vacuum (UHV) analytical systems.

Technical Specifications

Parameter Specification Details
Model / Part Number EI-R04M
Manufacturer Shimadzu Corporation
Compatible Pump Shimadzu EI-Series Mag-Lev Turbomolecular Pumps (e.g., EI-400 / EI-1000 Series)
Control Architecture 5-Axis Active Magnetic Suspension & Motor Frequency Inverter
Input Voltage 200–240 VAC, 1-Phase, 50/60 Hz
Interface Options RS-232C Serial, Remote Parallel I/O, Status Relay Interlocks
Cooling Method Forced Air (Internal Fan Cooled)
Enclosure Format Standard 19" Rack-Mount / Modular Benchtop Chassis
Dimensions Approx. 5.9" H x 17.0" W x 15.0" D (150 mm x 432 mm x 381 mm)
Weight ~31 lbs (14 kg)

Target Applications

  • Semiconductor Wafer Processing (Etch, CVD, PVD)

  • Electron Microscopy & Analytical Instruments

  • Thin-Film Deposition & Optical Coating Systems

  • High-Energy Physics & Laboratory UHV Systems

  • Direct OEM Controller Replacement & Service Retrofitting

$4,249.00
$4,249.00
Shipping calculated at checkout.
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