Shimadzu

Shimadzu EI-D3413M Turbomolecular Pump Controller with Included TPB-60D

Part Number: EID3413M
Condition: Refurbished
In Stock

The Shimadzu EI-D3413M is a high-capacity digital controller designed to power and manage Shimadzu magnetically levitated turbomolecular pumps (such as the EI-3413M series). Operating completely oil-free through 5-axis active magnetic levitation, the controller delivers precise motor frequency drive, rotor position sensing, and automatic braking control.

This unit includes the companion Shimadzu TPB-60D Power Box / Power Supply Module, providing stable power conditioning, high-current drive delivery, and enhanced electrical surge protection required for high-throughput semiconductor wafer tools and large-scale industrial vacuum coating systems.

Technical Specifications

Parameter Specification Details
Controller Model EI-D3413M
Included Power Module TPB-60D Power Box
Manufacturer Shimadzu Corporation
Compatible Pump Shimadzu EI-3413M / EI-Series Mag-Lev Turbomolecular Pumps
Control Architecture 5-Axis Active Magnetic Levitation & Inverter Motor Drive
Input Voltage 200–240 VAC, 3-Phase or 1-Phase Configurable, 50/60 Hz
Interface Options RS-232C Serial, Remote Parallel I/O, Status Relay Interlocks
Cooling Method Forced Air (Internal Fan Cooled)
Mounting Format Standard 19" Rack-Mount / Modular Stack Chassis
Combined Weight ~65 lbs (29.5 kg)

Target Applications

  • Semiconductor Wafer Manufacturing (Plasma Etch, CVD, PVD)

  • Flat Panel Display (FPD) & OLED Vacuum Deposition

  • Industrial Thin-Film Glass & Optical Coating

  • High-Energy Physics & Large UHV Research Facilities

  • OEM Tool Controller / Power Supply Retrofitting

$7,295.00
$7,295.00
Shipping calculated at checkout.
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