Shimadzu

Shimadzu EI-D303M Turbomolecular Pump Controller

Condition: Refurbished
In Stock

The Shimadzu EI-D303M is an advanced electronic drive unit engineered for controlling Shimadzu magnetically levitated turbomolecular pumps (such as the EI-303M series). Operating completely oil-free through 5-axis active magnetic levitation, the controller manages motor rotation, rotor position sensing, and automatic braking sequences. Its robust protective logic guards against power loss, gas surge overloads, and thermal anomalies, making it a critical component for ultra-clean semiconductor processing and analytical instruments.

Technical Specifications

Parameter Specification Details
Model / Part Number EI-D303M
Manufacturer Shimadzu Corporation
Compatible Pump Shimadzu EI-303M / Related Mag-Lev Turbomolecular Pumps
Control Architecture 5-Axis Magnetic Levitation & Motor Inverter Drive
Input Voltage 200–240 VAC, 1-Phase, 50/60 Hz
Interface Ports RS-232C / RS-485 Serial, Remote I/O Interlock Terminal
Cooling Method Air Cooled (Internal Fan)
Dimensions Approx. 5.9" H x 17.0" W x 15.0" D (150 mm x 432 mm x 381 mm)
Weight ~33 lbs (15 kg)

Target Applications

  • Electron Microscopy & Analytical Instrumentation

  • Semiconductor Etch, CVD, and PVD Processing

  • Flat Panel Display (FPD) Vacuum Chambers

  • Vacuum Metallurgy & Thin-Film Coating

$4,295.00
$4,295.00
Shipping calculated at checkout.
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