Shimadzu EI-D203M Turbomolecular Pump Controller

The Shimadzu EI-D203M is a dedicated digital turbomolecular pump controller designed to drive magnetically levitated turbomolecular pumps in the Shimadzu TMP-203M series (such as the TMP-203M-G1).

Engineered for precision vacuum management, the EI-D203M controls magnetic levitation, rotor acceleration, rotational speed regulation, and real-time diagnostic reporting. It provides power management and system protection for high-vacuum and ultra-high-vacuum (UHV) applications, making it essential for semiconductor equipment, mass spectrometers, and analytical systems.

Key Features & Benefits

• 5-Axis Magnetic Levitation Control: Manages the active magnetic bearing system for vibration-free, hydrocarbon-free vacuum performance.

• System Diagnostics & Monitoring: Real-time speed output, temperature supervision, and fault monitoring for continuous operation.

• Compact Rack-Mount Design: Standard industrial footprint designed for smooth integration into semiconductor tool racks or analytical instrument benches.

• Remote & Local Interfaces: Offers serial communication and I/O logic for system integration and automated control.

Technical Specifications

Applications

• Semiconductor Manufacturing Equipment

• Gas Chromatography–Mass Spectrometry (GC-MS) & Analytical Instruments

• Thin-Film Deposition & Surface Analysis Systems

• High-Vacuum Research Laboratories