Seiko Seiki / Edwards STP-H301C Turbomolecular Pump

The Seiko Seiki/BOC Edwards STP-H301C (often branded under BOC Edwards) (PN: YT34-80-080) is a high-throughput, magnetically levitated turbomolecular vacuum pump engineered specifically for harsh industrial applications. By utilizing an advanced magnetic bearing system, it eliminates the risk of oil contamination and significantly reduces mechanical wear. This makes it a preferred choice for high-duty-cycle semiconductor manufacturing, plasma etching, and chemical vapor deposition (CVD) environments.

Technical Specifications

Key Features & Capabilities

• Harsh Process Compatibility: The "C" designation indicates specialized internal anti-corrosion treatments, protecting the rotor and stator components from aggressive corrosive gases like chlorine, fluorine, and bromine chemistries.

• Zero Oil Contamination: The fully magnetic bearing suspension requires no lubrication oil, ensuring an ultra-clean, hydrocarbon-free vacuum environment.

• Thermal Management System (TMS) Ready: Optimized temperature distribution prevents gas condensation and byproduct deposition inside the pump casing, drastically extending maintenance intervals.

• High Gas Throughput: Advanced rotor profiling accommodates higher gas loads without compromising ultimate pressure performance.

Common Applications

• Semiconductor Processing (Metal/Polysilicon Plasma Etching)

• Thin-Film Deposition (CVD, PECVD, MOCVD, Sputtering)

• Ion Implantation (Source and beamline pumping)

• Flat Panel Display (FPD) manufacturing