Edwards

Seiko Seiki / Edwards SCU-H803C Turbomolecular Pump Controller

Condition: Refurbished
In Stock

The Seiko Seiki / Edwards SCU-H803C is a high-performance digital controller engineered to drive and levitate the STP-H803C series magnetically levitated turbomolecular pumps. Built with a 5-axis active magnetic bearing suspension system, it manages motor frequency, rotor levitation, and thermal limits without physical contact. Equipped with parallel I/O and serial communication capabilities, the controller ensures seamless integration into automated process tools while offering real-time diagnostic readouts and protective interlock safeguards.

Technical Specifications

Parameter Specification Details
Model / Part Number SCU-H803C
Manufacturer Seiko Seiki / Edwards Vacuum
Compatible Pump Edwards / Seiko Seiki STP-H803C Series
Drive Architecture 5-Axis Magnetic Levitation & Motor Inverter Drive
Input Voltage 200–240 VAC, 1-Phase, 50/60 Hz
Interface Options Serial RS-232C, Remote Parallel I/O, Status Relay Interlocks
Cooling Method Forced Air / Internal Fan
Dimensions Approx. 5.9" H x 17.0" W x 15.5" D (150 mm x 432 mm x 394 mm)
Weight ~31 lbs (14 kg)

Target Applications

  • Semiconductor Wafer Etching & Deposition Equipment

  • Vacuum Coating & Optical Thin-Film Systems

  • Flat Panel Display (FPD) Vacuum Platforms

  • OEM Controller Replacement & Retrofitting

$4,249.00
$4,249.00
Shipping calculated at checkout.
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