Edwards

Seiko Seiki / Edwards SCU-H1303CV3 Turbomolecular Pump Controller

Condition: Refurbished
In Stock

The Seiko Seiki / Edwards SCU-H1303CV3 is an advanced, heavy-duty digital controller designed specifically for the STP-H1303CV3 series magnetically levitated turbomolecular pumps. The "CV3" specification designates support for corrosive chemical process variants equipped with Temperature Management Systems (TMS). The controller regulates 5-axis magnetic rotor suspension, motor speed, and integrated heating band power to prevent process gas condensation, ensuring maximum operational reliability in severe semiconductor fabrication environments.

Technical Specifications

Parameter Specification Details
Model / Part Number SCU-H1303CV3
Manufacturer Seiko Seiki / Edwards Vacuum
Compatible Pump Edwards / Seiko Seiki STP-H1303CV3 Series
Drive Architecture 5-Axis Magnetic Bearing Suspension & TMS Temperature Control
Input Voltage 200–240 VAC, 1-Phase, 50/60 Hz
TMS Control Interface Integrated Heater Power Output & Thermal Sensor Inputs
Interface Options RS-232C / RS-485, Remote Parallel I/O, Emergency Interlocks
Dimensions Approx. 6.8" H x 19.0" W x 16.5" D (173 mm x 483 mm x 419 mm)
Weight ~37.5 lbs (17 kg)

Target Applications

  • Corrosive Semiconductor Processing (Etch, CVD, PECVD)

  • Flat Panel Display (FPD) Vacuum Systems

  • Solar & Photovoltaic Layer Deposition

  • Direct Replacement for Legacy Seiko Seiki Control Racks

$5,295.00
$5,295.00
Shipping calculated at checkout.
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