Pfeiffer

Pfeiffer Vacuum TMU 071-003 Y P Turbomolecular Pump

Part Number: PM103794AT
Condition: Refurbished
In Stock

The Pfeiffer TMU 071-003 Y P is a compact, high-performance hybrid turbomolecular pump designed for hydrocarbon-free ultra-high vacuum applications. Built with Pfeiffer's proven bearing design, it pairs maintenance-free magnetic bearings on the high-vacuum side with precision ceramic ball bearings on the fore-vacuum side to deliver long service life and high operational reliability.

  • Flexible Installation: Omnidirectional mounting allows seamless integration into tight system spaces and custom analytical rigs.

  • Corrosion/Process Resistance: Integrated purge gas connection to protect the motor and bearing compartment from aggressive process gases and particulate contamination.

  • Rapid Response: Reaches full operating speed (90,000 RPM) in under 2 minutes for quick process cycling.

Technical Specifications

Parameter Specification
Manufacturer Pfeiffer Vacuum
Model TMU 071-003 Y P
Part Number PM 103 794 AT
High Vacuum Flange (Inlet) DN 63 ISO-K
Fore-Vacuum Flange (Outlet) DN 16 ISO-KF
Weight 2.8 kg (6.2 lbs)
Pumping Speed (N2) 59 l/s
Pumping Speed (He) 55 l/s
Pumping Speed (H2) 39 l/s
Compression Ratio (N2) >1×108
Compression Ratio (He) 1×105
Compression Ratio (H2) 1.5×103
Ultimate Pressure <1×10−7 mbar (with diaphragm backing pump)
Nominal Rotation Speed 90,000 RPM
Run-Up Time 1.5 min
Bearing System Hybrid (Ceramic ball bearing at fore-vacuum side, permanent magnetic bearing at High Vacuum side)
Mounting Orientation Any angle (0 to 360)
Purge/Venting Connection G 1/8"
Cooling Method Convection / Air / Water (application dependent)
Compatible Drive Controllers TC 600, TCP 040, TCP 121, or equivalent

Target Applications

  • Mass Spectrometry & Analytical Instrumentation

  • R&D / Laboratory Ultra-High Vacuum (UHV) Systems

  • Surface Analysis & Electron Microscopy

  • Thin Film Deposition & Semiconductor R&D

  • Leak Detection Systems

  • General Vacuum Physics Experiments

Regular price
$1,950.00
Sale price
$1,950.00
Regular price
Shipping calculated at checkout.
Recommended

You May Also Like

Find essential tools to support every step of semiconductor manufacturing.