Labvac

Pfeiffer Vacuum TMH 261 Turbomolecular Pump

Name: Pfeiffer Vacuum TMH 261 Turbomolecular Pump
Brand: Labvac
Price: 4959.00 USD
Availability: InStock

Part Number: PMP02820H

Condition: Refurbished

In Stock

he Pfeiffer TMH 261 is a high-performance, classic-line TurboDrag™ molecular vacuum pump designed for high reliability across demanding semiconductor processing, industrial manufacturing, and laboratory R&D applications. This pump utilizes Pfeiffer’s time-tested hybrid bearing architecture, which features a wear-free permanent magnetic bearing on the high-vacuum side to eliminate physical contact and reduce vibration, combined with a heavy-duty, oil-lubricated ceramic ball bearing on the foreline/backing side.

This specific part number, PM P02 820 H, designates the high-throughput ("H") configuration, offering optimized rotor mechanics to maintain stability under high continuous gas loads. It comes equipped with a DN 100 ISO-K high-vacuum inlet flange and a standard DN 25 ISO-KF fore-vacuum exhaust port.

Part Number (MPN): PM P02 820 H (Cross-references: PMP02820 / PMP02820H)
High Vacuum Inlet Flange: DN 100 ISO-K
Fore-Vacuum / Exhaust Flange: DN 25 ISO-KF
Recommended Electronic Drive Unit: Pfeiffer TC 600

Key Features & Benefits

High-Throughput Configuration: The "H" designation marks specialized rotor geometry designed to safely process higher volume mass flow streams without stalling.
Premium Hybrid Bearings: Delivers ultra-clean vacuum conditions due to the touch-free upper magnetic bearing, while the rugged ceramic lower bearing ensures dependable alignment under load.
Rapid Cycle Times: Reaches a nominal rotational velocity of 60,000 rpm in just 1.6 minutes, minimizing process downtime.
Flexible Thermal Management: Operates reliably with passive convection or can be integrated with accessory water-cooling blocks or forced-air fan units for high gas throughput operations.
Industrial Compatibility: Pairs perfectly with standard external drive units like the TC 600, allowing easy drop-in replacement on older automated equipment tracks.

Technical Specifications

Parameter	Specification
Pumping Speed ( $N_2$ )	210 l/s
Pumping Speed ( $He$ / $Ar$ )	220 l/s / 200 l/s
Pumping Speed ( $H_2$ )	175 l/s
Nominal Rotation Speed	60,000 rpm ( $\pm$ 2%)
Ultimate Pressure (Rotary Vane backed)	< $1 \times 10^{-7}$ mbar (< $7.5 \times 10^{-8}$ Torr)
Compression Ratio ( $N_2$ / $Ar$ )	> $1 \times 10^{9}$
Compression Ratio ( $H_2$ )	$1.4 \times 10^4$
Max Fore-Vacuum Pressure ( $N_2$ )	10 mbar
Run-Up Time	1.6 minutes
Drive Voltage Requirement	48 V DC ( $\pm$ 5%)
Max Power Consumption	200 W
Sound Pressure Level	$\le$ 50 dB(A)
Lubricant Type	TL 011 Oil
Weight	6.1 kg (13.44 lbs)

Typical Applications

The physical stability and robust performance threshold of the TMH 261 make it a vital component for classic industrial tool support:

Analytical Testing Platforms: Mass Spectrometry (GC-MS, LC-MS), Residual Gas Analysis (RGA), and leak detection benches.
Semiconductor Processing: Vacuum sputtering setups, plasma monitoring instrumentation, and defect analysis vacuum chambers.
Industrial Surface Finishing: Desktop thin-film coaters, electron beam welding setups, and optical coating tools.
Advanced R&D: Particle accelerators, space simulation test loops, and high-energy laboratory physics systems.

Regular price: $4,959.00
Sale price: $4,959.00
Regular price