Pfeiffer Vacuum TMH 071 P Turbomolecular Pump

The Pfeiffer TMH 071 P is a robust, compact turbomolecular drag pump engineered for high-reliability applications across both industrial processing and precision analytical laboratories. Known for its exceptional mechanical endurance, the TMH 071 P utilizes Pfeiffer's classic hybrid bearing architecture: a wear-free permanent magnetic bearing on the high-vacuum side paired with a heavy-duty, oil-lubricated ceramic ball bearing on the foreline/backing side.

This specific part number (PM P03 201) features a DN 63 ISO-K high-vacuum inlet flange and comes equipped with a modern integrated TC 750/TC-750-E74 electronic drive unit, providing compact onboard control and enhanced interface safety protocols. The "P" suffix designates an integrated purge/sealing gas connection port, enabling active protection of the motor and internal bearing assembly against particulate ingress or aggressive media process variables.

• Part Number (MPN): PM P03 201 (Cross-references: 2000016925 / PM C01 712)

  
  

• High Vacuum Inlet Flange: DN 63 ISO-K

  
  

• Fore-Vacuum / Exhaust Flange: DN 16 ISO-KF

  
  

• Drive Electronics: TC 750/750-E74 controller

  
  

Key Features & Benefits

• Proven Hybrid Bearings: The permanent magnetic upper bearing runs completely touch-free to eliminate wear and vibration on the high-vacuum side, while the bottom ceramic bearing delivers reliable fore-vacuum side radial stability.

  
  

• Purge Gas Protection: Built-in purge port enables metered sealing gas line integration, actively preventing backing-stream contaminants or minor process chemistry from entering the motor well.

• Ultra-Fast Acceleration: High-torque internal motor geometry achieves a full operational speed of 90,000 rpm in under 2 minutes.

• Integrated TC 750 Drive Unit: Eliminates the need for bulky external rack-mount controllers; accepts direct 24 V DC supply power and provides robust fault, interlock, and speed diagnostics.

  
  

• Flexible Cooling Profiles: Standard passive convection cooling can be augmented via accessory forced-air fan assemblies or direct-mount water-cooling blocks based on process gas load conditions.

Technical Specifications

Typical Applications

The physical footprint and sealing-gas readiness of the TMH 071 P make it an excellent choice for legacy tool support and modern integrations alike:

• Analytical Equipment: Mass Spectrometers (GC-MS), residual gas analyzers (RGAs), and helium leak detection benches.

• Vacuum Processing: Thin-film desktop coaters, sputter deposition systems, and plasma etching tools.

• R&D Environments: UHV high-energy physics beamlines, clean auxiliary backing systems, and space simulation test chambers.