Osaka Vacuum TG1113MBW-09 Turbomolecular Pump
The Osaka Vacuum TG1113MBW-09 is a high-capacity, 5-axis magnetically levitated turbomolecular pump engineered for oil-free, ultra-clean high-vacuum environments. Built with active electromagnetic suspension, it eliminates contact friction and lubricant contamination, offering low vibration and extended operational service life.
The "MBW" specification denotes a high-throughput, water-cooled configuration with an ISO-flanged intake, while the "-09" dash code indicates a specific OEM hardware revision tailored for semiconductor wafer processing and industrial vacuum equipment platforms. It provides continuous stability during heavy process gas loads and includes built-in thermal protection to safeguard the rotor and magnetic bearing array.
Technical Specifications
Target Applications
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Semiconductor Wafer Manufacturing (Plasma Etch, CVD, PVD)
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Flat Panel Display (FPD) & OLED Vacuum Deposition
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Solar Cell & Thin-Film Photovoltaic Layer Deposition
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Industrial Surface Coating & Optical Thin-Film Systems
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High-Energy Physics & National Laboratory UHV Systems
- Regular price
- $15,295.00
- Sale price
- $15,295.00
- Regular price
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