Osaka Vacuum TG 900 MBWC Magnetically Levitated Turbo Molecular Pump

The Osaka Vacuum TG 900 MBWC (Part Number: TG900MBWC) is a premium, 5-axis active magnetically levitated turbomolecular pump engineered for ultra-clean, hydrocarbon-free high vacuum (UHV) applications. Featuring an ISO-B160 inlet flange, water-cooling configuration ("W"), and a corrosive-resistant process finish ("C"), the TG 900 MBWC is built to withstand aggressive process gases, chemical vapors, and high-throughput semiconductor/industrial coating environments. Because the rotor is suspended contact-free by magnetic levitation, the pump operates virtually friction-free and vibration-free with an extended service life.

Key Features

• 5-Axis Active Electromagnetic Suspension: Contact-free rotor levitation eliminates mechanical bearings, oil contamination, and routine bearing wear.

• Corrosive-Resistant "C" Variant: Specialty anti-corrosion treatments and gas purge capabilities shield internal components from harsh chemical, PVD, and semiconductor process gases.

• High Pumping Throughput: Delivers nominal pumping speeds of up to 900 L/s (N2) and 1,050 L/s (H2).

• Any-Orientation Mounting: Active levitation architecture permits mounting in vertical, horizontal, or inverted orientations without operational performance loss.

• Water-Cooled Thermal Management: Integrated liquid-cooling jackets maintain thermal stability during high gas load processes.

Technical Specifications