Leybold TURBOVAC TW 300 Turbomolecular Pump
The Leybold TURBOVAC TW 300 (P/N 800170V2101) is a high-performance, compound-stage turbomolecular pump designed for clean high-vacuum (HV) and ultra-high-vacuum (UHV) applications. Featuring a compact profile, grease-lubricated ceramic bearings, and robust foreline pressure tolerance, the TW 300 delivers exceptional reliability and low vibration for sensitive laboratory and analytical environments.
Equipped with a DN 100 ISO-K inlet flange, this unit is widely utilized across semiconductor processing, mass spectrometry, surface analysis, and general R&D vacuum systems.
Key Features & Benefits
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High Pumping Efficiency: Delivers pumping speeds up to 240 l/s (N2) with high compression ratios for light gases (H2, He).
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DN 100 ISO-K Inlet: Standard claw-clamp style high-vacuum connection for fast installation and integration.
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High Foreline Tolerance: Allows pairing with downsized backing pumps (e.g., small rotary vane or dry diaphragm pumps).
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Clean Hydrocarbon-Free Vacuum: Ideal for oil-sensitive analytical instruments and semiconductor process chambers.
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Low Noise & Vibration: Precision-balanced rotor assembly ensures quiet operation (<49 dB(A)).
Technical Specifications
| Feature / Metric | Specification |
|---|---|
| Manufacturer | Oerlikon Leybold Vacuum |
| Model | TURBOVAC TW 300 |
| Part Number | 800170V2101 |
| High Vacuum Flange (Inlet) | DN 100 ISO-K |
| Forevacuum Flange (Exhaust) | DN 16 KF |
| Pumping Speed (N2) | 240 l/s |
| Pumping Speed (Ar) | 230 l/s |
| Pumping Speed (He) | 230 l/s |
| Pumping Speed (H2) | 140 l/s |
| Ultimate Pressure | <2×10−8 mbar (with 2-stage rotary vane backing) |
| Nominal Speed | 60,000 RPM |
| Run-up Time | ∼4 minutes |
| Noise Level | <49 dB(A) |
| Weight | 6.0 kg (13.2 lbs) |
| Recommended Backing Pump | Leybold TRIVAC D 2,5 E or ECODRY M15 |
Typical Applications
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Mass Spectrometry & Analytical Equipment
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R&D and UHV System Pumping
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Electron Microscopy
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Load Locks and Sample Transfer Chambers
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Thin-Film Deposition Systems
- Regular price
- $5,295.00
- Sale price
- $5,295.00
- Regular price
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- Unit price
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