Leybold TURBOVAC SL 80 Turbomolecular Pump
The Leybold TURBOVAC SL 80 is a compact, premium-line mechanical bearing turbomolecular pump engineered to deliver reliable, oil-free high and ultra-high vacuum (UHV) conditions. Designed with precision multi-stage rotor blade geometry and an integrated Holweck molecular drag stage, the SL 80 provides exceptional light-gas compression ratios and a high foreline pressure tolerance of up to 20 mbar.
This specific configuration, Part Number 800002V3002, features a DN 63 CF (4.50" OD) ConFlat high-vacuum inlet flange. This metal-sealed, ultra-clean knife-edge flange allows the pump to be fully baked out, enabling the system to reach deep UHV pressures down into the 10−10 mbar range. The pump utilizes lifetime grease-lubricated ceramic ball bearings, allowing for vibration-free operation and highly flexible installation configurations.
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Part Number (MPN): 800002V3002
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Inlet Flange (High Vacuum): DN 63 CF (4.50" OD)
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Outlet Flange (Fore-Vacuum): DN 16 ISO-KF
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Lubrication System: Dry, lifetime-lubricated ceramic bearings
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Required Controller: TURBO.DRIVE TD 400 series
Key Features & Benefits
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True UHV Performance: Equipped with an all-metal ConFlat inlet flange, minimizing outgassing and enabling ultimate pressures as low as 2.0×10−10 mbar (1.5×10−10 Torr).
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High Foreline Tolerance: The secondary Holweck drag stage accommodates backing line pressures up to 20 mbar(15 Torr), allowing it to work seamlessly with smaller backing pumps.
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Arbitrary Orientation Mounting: Unique mechanical suspension design allows the pump to be operated in any installation angle or orientation without performance penalties.
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Split-Cage DC Motor: Windings are separated from the vacuum zone by a vacuum-tight can wall, eliminating electrical feedthrough risks and preventing process contamination.
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Purge & Vent Ready: Built-in purge gas facility allows the injection of a clean sealing gas stream to safeguard mechanical internals during sensitive operations.
Technical Specifications
| Parameter | Specification |
|---|---|
| Pumping Speed (N2) | 65 l/s |
| Pumping Speed (Ar) | 60 l/s |
| Pumping Speed (He) | 55 l/s |
| Pumping Speed (H2) | 49 l/s |
| Ultimate Pressure (CF Flange) | 2.0×10−10 mbar (1.5×10−10 Torr) |
| Compression Ratio (N2) | 1.0×1011 |
| Compression Ratio (H2) | 4.0×104 |
| Max Foreline Pressure (N2) | 20.0 mbar (15.0 Torr) |
| Nominal Frequency / Speed | 1,200 Hz / 72,000 rpm |
| Ramp-Up / Start Time | 90 seconds (1.5 min) |
| Max Total Rated Power | 190 W |
| Cooling Profile | Forced Air / Convection / Optional Water |
| Sound / Noise Level | ≤ 46 dB(A) |
| Weight | 3.10 kg (6.82 lbs) |
Typical Applications
Thanks to its small footprint, high backing tolerance, and clean ConFlat design, the SL 80 is heavily utilized across precision fields:
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Analytical Instrumentation: High-end Mass Spectrometry architectures (GC-MS, LC-MS, Q-TOF) and portable analytical systems.
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Gas Diagnostics: Residual Gas Analyzers (RGAs) and mobile helium leak detection carts.
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Thin-Film R&D: Physical Vapor Deposition (PVD), desktop optical coating, and photovoltaic testing rigs.
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Surface Science: Ultra-high vacuum transfer hubs, beamlines, and electron-beam microscopy instrumentation.
- Regular price
- $3,985.00
- Sale price
- $3,985.00
- Regular price
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- Unit price
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