Leybold Turbovac MAG W 600 iP Turbomolecular Pump
The Leybold Turbovac MAG W 600 iP is an ultra-clean, high-capacity turbomolecular vacuum pump employing a advanced 5-axis active magnetic rotor suspension system. Engineered specifically for highly vibration-sensitive and high-throughput environments—such as electron microscopy, mass spectrometry, and semiconductor process lines—this pump delivers completely oil-free, hydrocarbon-free high to ultra-high vacuum (UHV).
The "iP" designation marks this model as a member of Leybold's premier integrated platform, featuring a fully onboard frequency converter drive and integrated purge/vent ports built directly into the pump base. By packing all active electronics into the bottom footprint, the MAG W 600 iP entirely eliminates the need for external, rack-mounted controllers and thick, high-frequency interconnect umbilical lines.
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Fully Integrated Frequency Converter: Space-saving, true plug-and-play architecture allows rapid installation and tool optimization without consuming rack room.
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Active 5-Axis Magnetic Bearings: Zero mechanical contact friction guarantees maintenance-free operations and removes background vibration harmonics entirely.
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Integrated Purge/Vent Valve Port: Features a built-in DN 16 KF connection for introducing inert barrier gases, safeguarding internal components during complex processes.
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Modular Industrial Communication: Equipped with versatile communication slots accommodating multi-protocol industrial interfaces for simplified system integration.
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Generator Safety Braking Mode: In the event of an abrupt facility power failure, the drive system automatically transitions into an inductive generator mode, using the rotor's kinetic deceleration to keep the magnetic bearing suspended safely down to a stop.
Technical Specifications
| Parameter | Specification |
|---|---|
| Manufacturer | Leybold Vacuum (Germany) |
| Model | Turbovac MAG W 600 iP |
| Common Factory Part Numbers | 410600V0505 (ISO-K 160) | 410600V0506 (DN 160 CF) | 410600V0525 (Water-Cooled variant) |
| High-Vacuum Inlet Flange | DN 160 ISO-K or DN 160 CF (8" ConFlat) |
| Foreline / Backing Connection | DN 25 ISO-KF (Clamped) |
| Integrated Purge/Vent Port | DN 16 ISO-KF (Clamped shoe layout) |
| Pumping Speed (N2) | 550 L/s |
| Pumping Speed (Ar / He) | 520 L/s / 570 L/s |
| Pumping Speed (H2) | 410 L/s |
| Compression Ratio (N2) | 1.6×1010 |
| Ultimate Pressure (CF Flange) | <1.0×10−10 mbar (<7.5×10−11 Torr) |
| Ultimate Pressure (ISO Flange) | <1.0×10−8 mbar (<0.75×10−8 Torr) |
| Nominal Rotational Speed | 48,000 RPM |
| Ramp-Up / Start-up Time | ≈6 minutes |
| Max Power Consumption | 400 W (100 W at idle/ultimate base pressure) |
| Cooling Profile | Ambient Convection Base (Optional Air Fan or Integrated G 1/8" Water Block) |
| Communication Protocols | 9-Pin 24V PLC I/O (Standard) | Supports Ethernet, Profibus, RS-232, RS-485 |
| Weight | 17 kg (37.5 lbs) |
Applications & Tool Integration
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Electron Beam Systems (SEM, TEM, Lithography tools)
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Analytical Analytical Instruments (Mass Spectrometry, RGA, Surface Science)
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Semiconductor Equipment (Load-Lock Assemblies, Transfer Chambers, Metrology)
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Thin-Film Deposition Systems (PVD, Sputtering, Optical Coating lines)
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Large-Scale High-Energy Physics & R&D UHV Chambers
- Regular price
- $7,795.00
- Sale price
- $7,795.00
- Regular price
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- Unit price
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