Leybold TURBOVAC MAG W 3200 CT Turbomolecular Pump

The Leybold TURBOVAC MAG W 3200 CT is an ultra-high-capacity, magnetically levitated turbomolecular pump engineered for demanding semiconductor, LCD display, and industrial vacuum coating platforms. Achieving high nitrogen pumping speeds up to 3,200 L/s, it features a 5-axis active magnetic bearing suspension system that eliminates mechanical contact and oil lubrication for clean, vibration-free operation.

The "CT" (Corrosive with Thermal management) variant incorporates internal corrosion-resistant coatings, active purge gas capabilities, and integrated temperature regulation to prevent process gas condensation and handle heavy particulate or reactive gas loads.

Technical Specifications

Target Applications

• Semiconductor Wafer Manufacturing (Plasma Etch, CVD, PECVD, PVD)

• Large-Area Flat Panel Display (LCD/OLED) Processing

• Industrial Architectural Glass & Optical Coating Systems

• Solar Cell & Photovoltaic Layer Deposition

• High-Energy Physics & UHV Research Facilities