Leybold TURBOVAC MAG W 1300 C Turbomolecular Pump
The Leybold TURBOVAC MAG W 1300 C is a high-performance, magnetically levitated turbomolecular pump designed to deliver hydrocarbon-free, ultra-clean high vacuum for demanding semiconductor, industrial coating, and research applications. Equipped with a 5-axis active magnetic bearing system, it operates completely contact-free to eliminate mechanical wear, oil contamination, and operational vibration. The "C" series variant features specialized anti-corrosion protective coatings and gas-purge integration, making it ideal for aggressive process gas environments and continuous high-throughput duty cycles.
Technical Specifications
| Parameter | Specification Details |
|---|---|
| Part Number | 400110V0017 |
| Model | TURBOVAC MAG W 1300 C |
| Inlet Flange | DN 200 CF / DN 200 ISO-F / ISO-200K Options |
| Outlet Flange | DN 40 ISO-KF (KF40) |
| Pumping Speed (N2) | 1,300 L/s |
| Pumping Speed (Ar) | 1,250 L/s |
| Pumping Speed (H2) | 1,100 L/s |
| Ultimate Pressure | < 1.0 x 10⁻¹⁰ mbar (< 7.5 x 10⁻¹¹ Torr) |
| Bearing System | 5-Axis Active Magnetic Levitation |
| Cooling Method | Water Cooled |
| Nominal Rotation Speed | 33,000 RPM (550 Hz) |
| Compatible Controller | Leybold TURBOVAC MAG.DRIVE Digital / MAG.DRIVE IS Series |
| Dimensions | Approx. 14.8" H x 11.8" Outer Diameter (375 mm x 300 mm) |
| Weight | ~92.5 lbs (42 kg) |
Target Applications
-
Semiconductor Wafer Manufacturing (Plasma Etch, CVD, PECVD, PVD)
-
Flat Panel Display (FPD) & OLED Vacuum Deposition
-
Industrial Surface Coating, Glass Coating & Metallurgy
-
Thin-Film Photovoltaic / Solar Cell Processing
-
High-Energy Physics & National UHV Research Laboratories
- Regular price
- $13,749.00
- Sale price
- $13,749.00
- Regular price
-
- Unit price
- / per
