Leybold

Leybold TURBOVAC MAG W 1300 C Turbomolecular Pump

Part Number: 400110V0017
Condition: Refurbished
In Stock

The Leybold TURBOVAC MAG W 1300 C is a high-performance, magnetically levitated turbomolecular pump designed to deliver hydrocarbon-free, ultra-clean high vacuum for demanding semiconductor, industrial coating, and research applications. Equipped with a 5-axis active magnetic bearing system, it operates completely contact-free to eliminate mechanical wear, oil contamination, and operational vibration. The "C" series variant features specialized anti-corrosion protective coatings and gas-purge integration, making it ideal for aggressive process gas environments and continuous high-throughput duty cycles.

Technical Specifications

Parameter Specification Details
Part Number 400110V0017
Model TURBOVAC MAG W 1300 C
Inlet Flange DN 200 CF / DN 200 ISO-F / ISO-200K Options
Outlet Flange DN 40 ISO-KF (KF40)
Pumping Speed (N2) 1,300 L/s
Pumping Speed (Ar) 1,250 L/s
Pumping Speed (H2) 1,100 L/s
Ultimate Pressure < 1.0 x 10⁻¹⁰ mbar (< 7.5 x 10⁻¹¹ Torr)
Bearing System 5-Axis Active Magnetic Levitation
Cooling Method Water Cooled
Nominal Rotation Speed 33,000 RPM (550 Hz)
Compatible Controller Leybold TURBOVAC MAG.DRIVE Digital / MAG.DRIVE IS Series
Dimensions Approx. 14.8" H x 11.8" Outer Diameter (375 mm x 300 mm)
Weight ~92.5 lbs (42 kg)

Target Applications

  • Semiconductor Wafer Manufacturing (Plasma Etch, CVD, PECVD, PVD)

  • Flat Panel Display (FPD) & OLED Vacuum Deposition

  • Industrial Surface Coating, Glass Coating & Metallurgy

  • Thin-Film Photovoltaic / Solar Cell Processing

  • High-Energy Physics & National UHV Research Laboratories

Regular price
$13,749.00
Sale price
$13,749.00
Regular price
Shipping calculated at checkout.
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