Leybold

Leybold TURBOVAC MAG.DRIVE Digital Controller

Condition: Refurbished
In Stock

The Leybold TURBOVAC MAG.DRIVE digital controller is a high-performance drive unit engineered to power, control, and levitate Leybold TURBOVAC MAG series magnetically levitated turbomolecular pumps. Featuring advanced digital signal processing and active 5-axis magnetic bearing management, it delivers precise rotor position control, low vibration, and automated speed regulation. Built with comprehensive diagnostic software interfaces, internal power conditioning, and robust fault-monitoring logic, the MAG.DRIVE digital controller ensures stable, hydrocarbon-free high-vacuum operation across demanding semiconductor, industrial coating, and analytical applications.

Technical Specifications

Parameter Specification Details
Model / Series TURBOVAC MAG.DRIVE Digital
Manufacturer Leybold Vacuum
Compatible Pumps Leybold TURBOVAC MAG W 300 / MAG W 600 / MAG W 1300 / MAG W 2200 / MAG 2000 Series
Control Architecture Digital 5-Axis Active Magnetic Levitation & Motor Inverter Drive
Input Voltage 100–240 VAC, 1-Phase, 50/60 Hz
Output Frequency Variable High-Frequency Drive (Up to 1,000 Hz)
Interface Options RS-232C, RS-485, Profibus / DeviceNet, Remote Parallel I/O, Relay Interlocks
Cooling Method Forced Air (Internal Fan Cooled)
Enclosure Format 19" Rack-Mount Chassis (3U) / Benchtop
Dimensions Approx. 5.2" H x 19.0" W x 15.7" D (133 mm x 483 mm x 400 mm)
Weight ~26.5 lbs (12 kg)

Target Applications

  • Semiconductor Wafer Manufacturing (Plasma Etch, CVD, PVD)

  • Large-Area Flat Panel Display (FPD) & OLED Vacuum Coating

  • Industrial Thin-Film Glass & Optical Deposition Systems

  • High-Energy Physics & National UHV Research Laboratories

  • Direct OEM Controller Replacement & Retrofitting

Regular price
$4,249.00
Sale price
$4,249.00
Regular price
Shipping calculated at checkout.
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