Leybold TURBOVAC MAG.DRIVE Digital Controller
The Leybold TURBOVAC MAG.DRIVE digital controller is a high-performance drive unit engineered to power, control, and levitate Leybold TURBOVAC MAG series magnetically levitated turbomolecular pumps. Featuring advanced digital signal processing and active 5-axis magnetic bearing management, it delivers precise rotor position control, low vibration, and automated speed regulation. Built with comprehensive diagnostic software interfaces, internal power conditioning, and robust fault-monitoring logic, the MAG.DRIVE digital controller ensures stable, hydrocarbon-free high-vacuum operation across demanding semiconductor, industrial coating, and analytical applications.
Technical Specifications
| Parameter | Specification Details |
|---|---|
| Model / Series | TURBOVAC MAG.DRIVE Digital |
| Manufacturer | Leybold Vacuum |
| Compatible Pumps | Leybold TURBOVAC MAG W 300 / MAG W 600 / MAG W 1300 / MAG W 2200 / MAG 2000 Series |
| Control Architecture | Digital 5-Axis Active Magnetic Levitation & Motor Inverter Drive |
| Input Voltage | 100–240 VAC, 1-Phase, 50/60 Hz |
| Output Frequency | Variable High-Frequency Drive (Up to 1,000 Hz) |
| Interface Options | RS-232C, RS-485, Profibus / DeviceNet, Remote Parallel I/O, Relay Interlocks |
| Cooling Method | Forced Air (Internal Fan Cooled) |
| Enclosure Format | 19" Rack-Mount Chassis (3U) / Benchtop |
| Dimensions | Approx. 5.2" H x 19.0" W x 15.7" D (133 mm x 483 mm x 400 mm) |
| Weight | ~26.5 lbs (12 kg) |
Target Applications
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Semiconductor Wafer Manufacturing (Plasma Etch, CVD, PVD)
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Large-Area Flat Panel Display (FPD) & OLED Vacuum Coating
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Industrial Thin-Film Glass & Optical Deposition Systems
-
High-Energy Physics & National UHV Research Laboratories
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Direct OEM Controller Replacement & Retrofitting
- Regular price
- $4,249.00
- Sale price
- $4,249.00
- Regular price
-
- Unit price
- / per
