Leybold TURBOVAC MAG 340 MCT Turbomolecular Pump

The Leybold TURBOVAC MAG 340 MCT (P/N 89433) is a high-performance, magnetically-levitated turbomolecular pump designed for clean, oil-free, high and ultra-high vacuum (UHV) applications. Featuring 5-axis active magnetic bearing suspension, the MAG 340 MCT completely eliminates mechanical contact and hydrocarbon contamination, delivering zero-vibration, zero-maintenance operation.

Equipped with a corrosive-gas purge option and optimized blade architecture, the MCT variant is tailored for harsh process environments including semiconductor etching, thin-film deposition, analytical surface instruments, and high-energy physics research.

Key Features & Benefits

• 5-Axis Active Magnetic Levitation: Contactless suspension eliminates bearing wear, mechanical vibration, and backstreaming of lubricating oils.

• Corrosive Process Compatibility ("MCT" Designation): Specially treated internal components and integrated purge gas ports protect magnetic bearings from reactive process gases.

• Clean Hydrocarbon-Free UHV: Achieves ultimate pressures down to 1×10−10 mbar, making it ideal for ultra-clean vacuum systems.

• Flexible Mounting: Can be installed in any orientation without risk of oil migration or bearing damage.

• Long Operating Lifespan: Eliminates periodic oil/grease replacements and extends service intervals up to 80,000 hours of continuous operation.

Technical Specifications

Applications

• Semiconductor processing (CVD, PVD, Reactive Ion Etch)

• Surface analysis instrumentation (XPS, SIMS, AES)

• High-energy particle physics and synchrotron beamlines

• Mass spectrometry and leak detection systems

• General cleanroom research and thin-film coating