Leybold TURBOVAC MAG 340 MC Turbomolecular Pump

The Leybold TURBOVAC MAG 340 MC (Part Number 89487) is a high-performance, magnetically levitated turbomolecular vacuum pump engineered for demanding cleanroom, analytical, and ultra-high vacuum (UHV) applications.

Featuring a 5-axis active magnetic bearing system, the MAG 340 MC completely eliminates oil-lubricated components from the vacuum stream. This design provides completely oil-free, hydrocarbon-free ultra-high vacuum generationwith minimal maintenance, zero mechanical contact wear, and exceptionally low vibration and noise levels.

Configured with a DN 100 ISO-K inlet flange, this pump is well-suited for sensitive analytical instrumentation, electron microscopes, surface analysis tools, particle accelerators, and semiconductor research systems.

Key Features & Benefits

• 5-Axis Active Magnetic Levitation: Frictionless, contact-free rotor support delivers maintenance-free operation, long service life, and extremely low vibration.

• 100% Oil-Free Vacuum: Hydrocarbon-free pumping chamber ensures clean vacuum for critical analytical process environments.

• Corrosion-Resistant "MC" Configuration: Designed with protective purge gas capability for handling aggressive process environments or delicate gases.

• Mounting Versatility: Can be mounted in any orientation without risk of oil migration or bearing drag.

• Emergency Safety System: Equipped with protective mechanical touch-down bearings to safely bring the rotor to rest during unplanned power interruptions.

Technical Specifications

Common Applications

• Electron Microscopy (SEM / TEM)

• Surface Analysis & Mass Spectrometry

• Particle Accelerators & Synchrotron Radiation Facilities

• High-Vacuum Research & Development (UHV/XHV chamber evacuation)

• Semiconductor Processing & Thin-Film Deposition

System Integration & Accessories

To operate the Leybold TURBOVAC MAG 340 MC, the following matching system components are required:

• Electronic Drive Controller: Leybold MAG NT 340M Power/Drive Unit.

• Interconnecting Cables: High-flex drive & magnetic bearing connection cable set.

• Purge & Vent Accessories: Purge gas valve (KF16) and vent valve (KF10) for controlled chamber venting and bearing protection.