Leybold

Leybold Turbovac 350iX High-Vacuum Turbomolecular Pump

Condition: Refurbished
In Stock

The Leybold Turbovac 350iX is a cutting-edge, high-performance turbomolecular pump engineered to deliver unmatched throughput and high compression ratios for clean high-vacuum and ultra-high vacuum (UHV) environments. Part of Leybold’s advanced "iX" intelligent series, this pump features a maintenance-free hybrid bearing design—combining a permanent-magnet upper bearing with a lifetime-lubricated ceramic lower mechanical ball bearing. This layout guarantees a hydrocarbon-free high vacuum with exceptional resistance to mechanical shock or sudden atmospheric venting.

The 350iX comes equipped with an integrated drive controller that features communication interfaces like RS485, USB, and digital I/O. Unlike the standard "i" models, the "iX" series incorporates the multi-accessory Xtention box, which enables direct control over a fore-vacuum pump, external gauge modules, and up to six independent accessories, turning the pump into a self-contained, total vacuum control solution.

Technical Specifications

Parameter Specification
Manufacturer Leybold Vacuum (Oerlikon)
Model Turbovac 350iX
Part Numbers 830051V3300 (ISO 100-K) / 830061V3300 (DN 100 CF)
Pumping Speed ()
Pumping Speed ( / ) /
Pumping Speed ()
Nominal Rotor Speed ()
Ultimate Pressure (CF Flange) / (ISO-K)
Max Foreline Pressure Up to ()
Ramp-Up Time ()
Inlet Flange Options DN 100 ISO-K or DN 100 CF
Foreline / Exhaust Flange DN 25 ISO-KF
Cooling Profile Forced Air / Convection or Water-Cooling Compatible
Weight Approx. ()
Communication Protocols RS485, USB, Remote Parallel I/O (Anybus fieldbus modular options)

Key Features & Benefits

  • Intelligent Total Vacuum Control: Integrated "iX" onboard computer handles accessory routing for venting valves, cooling fans, gauges, and backup roughing pumps directly through a single software interface.

  • Advanced Hybrid Bearings: Frictionless magnetic top stage limits wear and prevents downline process stream contamination.

  • Light Gas Optimization: Cutting-edge structural blade geometry dramatically steps up volumetric efficiency and compression profiles for Helium and Hydrogen processing.

  • Any-Orientation Installation: Perfectly balanced rotor dynamics allow tool engineers to safely install the pump at any physical angle or layout trajectory.

Regular price
$6,949.00
Sale price
$6,949.00
Regular price
Shipping calculated at checkout.
Recommended

You May Also Like

Find essential tools to support every step of semiconductor manufacturing.