Leybold Turbovac 151 Turbomolecular Pump

The Leybold Turbovac 151 (often designated as the TMP 151) (Part Number 85630) is a highly reliable, compact turbomolecular vacuum pump engineered for clean, high, and ultra-high vacuum applications. Part of Leybold’s proven ClassicLine series, this pump features robust, grease-lubricated mechanical bearings and can be operated in any spatial orientation, making it highly adaptable for complex system layouts.

Operating at a nominal speed of $50,000\text{ RPM}$, the Turbovac 151 delivers a $145\text{ L/sec}$ pumping speed (N2) and achieves ultimate pressures down into the 10−10 mbar range. It provides a clean, hydrocarbon-free environment optimal for sensitive analytical instruments, R&D systems, and high-purity industrial coaters.

Technical Specifications

Key Features & Benefits

• Flexible Mounting: Precision balanced internal mechanical rotor suspension permits problem-free operation in any installation orientation.

• Ultra-Clean Dry Vacuum: High-speed turbine geometry operating alongside oil-free internal structures guarantees reliable UHV background pressures free of hydrocarbon back-streaming.

• Fast Cycle Times: Reaches $95\%$ of nominal operating velocity within $2\text{ minutes}$, ideal for rapid load lock pumping and high-throughput tool cycles.

• Process Reliability: Well-suited for handling high-purity gas dynamics in analytical benches without systemic pressure drift. (Note: For corrosive/aggressive chemical environments, ensure utilization of the specialized purge-gas equipped "151 C" version).

Common Applications

• Leak detectors and mass spectrometers

• Ultra-high vacuum (UHV) systems and R&D systems

• Optical, thin-film, and electronic data storage coating systems

• Semiconductor load locks and transfer chambers