Leybold TURBOTRONIK NT 341M/I Electronic Frequency Converter & Magnetic Bearing Controller

The Leybold TURBOTRONIK NT 341M/I is an industrial-grade electronic frequency converter and active magnetic bearing controller designed to drive magnetically levitated Leybold TURBOVAC series turbomolecular pumps (such as the MAG 340, MAG 341, and MAG 400/410 series).

Engineered specifically for high-reliability semiconductor process equipment—including Applied Materials (AMAT) processing platforms—the NT 341M/I converts single-phase AC input into regulated DC power and high-frequency drive currents. It provides complete closed-loop management of the brushless DC motor and active 5-axis magnetic bearings, ensuring active rotor stabilization, low vibration, and real-time monitoring of pump operating parameters.

Key Features & Capabilities

• Integrated Dual Functionality: Combines motor frequency drive and active 5-axis magnetic bearing control into a single rack-mount unit.

• Semiconductor Tool Ready (AMAT Compatible): Specifically configured for integration with Applied Materials wafer-processing tools and OEM vacuum control interfaces.

• Real-Time Status Display: Front-panel LED display arrays report rotor speed, motor load current, bearing magnetic levitation status, and system fault diagnostics.

• Comprehensive Sensor Feedback: Continuously checks bearing currents and temperature parameters to protect against unbalance or thermal overload.

• Remote & Local Automation Interface: Features terminal strips, remote logic I/O, and serial communication (RS-232 / RS-485 interfaces) for remote tool integration.

Technical Specifications

Auxiliary Connections & Support Functions

• Forevacuum Pump Relay: Integrated control contacts for automated interlock with primary backing pumps.

• Cooling & Venting Control: Dedicated connection terminals for automated venting valves and external water/air cooling fans.

• Heating Element Interlock: Solenoid and relay controls for chamber/flange heater jackets.