Leybold MAG W 2200 C Turbomolecular Pump
The Leybold TURBOVAC MAG W 2200 C is a high-capacity, magnetically levitated turbomolecular pump designed to deliver hydrocarbon-free, ultra-clean high vacuum for demanding semiconductor, thin-film coating, and research environments. Featuring a 5-axis active magnetic bearing system, it operates completely contact-free to eliminate mechanical wear, oil contamination, and vibration. The "C" series includes protective coatings and gas-purge capabilities engineered to handle aggressive process gases, while its high nitrogen compression ratios ensure fast chamber pump-down times and continuous process stability.
Technical Specifications
| Parameter | Specification Details |
|---|---|
| Part Number | 400081V0121 |
| Model | TURBOVAC MAG W 2200 C |
| Inlet Flange | DN 250 CF / DN 250 ISO-F Options |
| Outlet Flange | DN 40 ISO-KF (KF40) |
| Pumping Speed (N2) | 2,100 – 2,200 L/s |
| Ultimate Pressure | < 1.0 x 10⁻¹⁰ mbar (< 7.5 x 10⁻¹¹ Torr) |
| Bearing System | 5-Axis Active Magnetic Levitation |
| Cooling Method | Water Cooled |
| Nominal Rotation Speed | 29,400 RPM (490 Hz) |
| Compatible Controller | Leybold MAG.DRIVE Digital Series |
| Dimensions | Approx. 15.4" H x 13.8" Outer Diameter (392 mm x 350 mm) |
| Weight | 132 lbs (60 kg) |
Target Applications
-
Semiconductor Wafer Fabrication (Plasma Etch, CVD, PVD)
-
Large-Area Flat Panel Display (FPD) & OLED Deposition
-
Architectural Glass & Optical Coating Systems
-
Surface Analysis & High-Energy UHV Physics Research
- Regular price
- $21,875.00
- Sale price
- $21,875.00
- Regular price
-
$24,999.00 - Unit price
- / per
