Leybold

Leybold MAG W 2200 C Turbomolecular Pump

Part Number: 400081V0121
Condition: Refurbished
In Stock

The Leybold TURBOVAC MAG W 2200 C is a high-capacity, magnetically levitated turbomolecular pump designed to deliver hydrocarbon-free, ultra-clean high vacuum for demanding semiconductor, thin-film coating, and research environments. Featuring a 5-axis active magnetic bearing system, it operates completely contact-free to eliminate mechanical wear, oil contamination, and vibration. The "C" series includes protective coatings and gas-purge capabilities engineered to handle aggressive process gases, while its high nitrogen compression ratios ensure fast chamber pump-down times and continuous process stability.

Technical Specifications

Parameter Specification Details
Part Number 400081V0121
Model TURBOVAC MAG W 2200 C
Inlet Flange DN 250 CF / DN 250 ISO-F Options
Outlet Flange DN 40 ISO-KF (KF40)
Pumping Speed (N2) 2,100 – 2,200 L/s
Ultimate Pressure < 1.0 x 10⁻¹⁰ mbar (< 7.5 x 10⁻¹¹ Torr)
Bearing System 5-Axis Active Magnetic Levitation
Cooling Method Water Cooled
Nominal Rotation Speed 29,400 RPM (490 Hz)
Compatible Controller Leybold MAG.DRIVE Digital Series
Dimensions Approx. 15.4" H x 13.8" Outer Diameter (392 mm x 350 mm)
Weight 132 lbs (60 kg)

Target Applications

  • Semiconductor Wafer Fabrication (Plasma Etch, CVD, PVD)

  • Large-Area Flat Panel Display (FPD) & OLED Deposition

  • Architectural Glass & Optical Coating Systems

  • Surface Analysis & High-Energy UHV Physics Research



Regular price
$21,875.00
Sale price
$21,875.00
Regular price
$24,999.00
Shipping calculated at checkout.
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