Leybold

Leybold MAG 2000 CT Turbomolecular Pump

Part Number: 40047V0022
Condition: Refurbished
In Stock

The Leybold TURBOVAC MAG 2000 CT is an industrial-grade, magnetically levitated turbomolecular pump designed for corrosive process gas applications in semiconductor and industrial thin-film tools. Utilizing a hydrocarbon-free 5-axis magnetic bearing structure, it completely eliminates wear and maintenance associated with mechanical bearings. The "CT" (Corrosive with Thermal management) variant includes purge gas capabilities and integrated heating/cooling options to prevent process by-product condensation inside the pump chamber.

Technical Specifications

Parameter Specification Details
Part Number 40047V0022
Model TURBOVAC MAG 2000 CT
Inlet Flange DN 250 ISO-K / DN 250 CF
Outlet Flange DN 40 ISO-KF (KF40)
Pumping Speed (N2) ~2,000 L/s
Bearing System 5-Axis Active Magnetic Levitation
Process Variant Chemical / Corrosive Guard (CT)
Cooling Method Water Cooled
Compatible Controller Leybold MAG DRIVE IS / MAG DRIVE 2000 Series
Dimensions Approx. 17.2" H x 13.0" Outer Diameter (437 mm x 330 mm)
Weight ~110 lbs (50 kg)

Target Applications

  • Reactive Ion Etching (RIE) & Plasma Etch Tools

  • Semiconductor Chemical Vapor Deposition (CVD)

  • Industrial Vacuum Metallurgy & Coating Systems

  • Solar Cell Layer Processing

$13,499.00
$13,499.00
Shipping calculated at checkout.
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