Edwards

Edwards STP-XA2703CV Turbomolecular Pump

Part Number: PT6616050
Condition: Refurbished
In Stock

The Edwards (Seiko Seiki) STP-XA2703CV is a high-throughput, magnetically levitated turbomolecular pump engineered for ultra-clean, oil-free high-vacuum applications. Featuring a 5-axis active magnetic suspension system, it completely eliminates mechanical friction and oil lubrication, delivering low vibration and exceptional continuous process reliability. The "CV" process variant provides advanced anti-corrosion protection and thermal management for harsh semiconductor etching and chemical vapor deposition processes.

Technical Specifications

Parameter Specification Details
Part Number PT66-16-050
Model STP-XA2703CV
Inlet Flange ISO250F / VG250
Outlet Flange KF40 (NW40)
Pumping Speed (N2) 2,650 L/s
Compression Ratio (N2) > 10⁸
Bearing System 5-Axis Active Magnetic Levitation
Cooling Method Water Cooled
Compatible Controller Edwards / Seiko Seiki SCU-1400 / SCU-1500 / SCU-1600 Series
Dimensions Approx. 19.8" H x 14.2" Outer Diameter (503 mm x 360 mm)
Weight ~165 lbs (75 kg)

Target Applications

  • Semiconductor Wafer Fabrication (Plasma Etch, CVD, PVD, Ion Implantation)

  • Flat Panel Display (FPD) Vacuum Process Systems

  • Solar & Photovoltaic Layer Deposition

  • Corrosive & Reactive Process Gas Handling

  • Ultra-High Vacuum (UHV) Research Facilities

$20,395.00
$20,395.00
Shipping calculated at checkout.
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