Edwards STP-XA2703BV3 Turbomolecular Pump

The Edwards STP-XA2703BV3 is a robust, highly efficient magnetically levitated turbomolecular pump designed for demanding high-vacuum industrial and manufacturing processes. Built with a 5-axis active magnetic suspension system, it provides zero contamination, low vibration, and long-term reliability. The "BV3" configuration features corrosive gas resistance and an optimized Temperature Management System (TMS) capable of reaching 85°C, reducing deposition in harsh applications. With an advanced rotor design, it handles maximum gas throughput for Argon up to 2,000 sccm, making it ideal for severe process environments.

Technical Specifications

Target Applications

• Semiconductor Wafer Manufacturing (Plasma Etch, Ion Implantation, Lithography)

• Liquid Crystal Display (LCD) Manufacturing Processes

• Chemical Vapor Deposition (CVD) and harsh corrosive gas handling

• Ultrahigh-vacuum industrial processes and components