Edwards

Edwards STP-XA-2703Y Turbomolecular Pump

Part Number: PT660Z100
Condition: Refurbished
In Stock

The Edwards (Seiko Seiki) STP-XA-2703Y is a high-performance, magnetically levitated turbomolecular pump engineered for demanding high-vacuum process environments. Delivering 2,650 L/s pumping speed, its 5-axis magnetic suspension system offers zero oil contamination and exceptionally low vibration. The "XA" advanced rotor technology improves light gas compression (H2, He) and maximizes gas throughput under heavy process loads, making it a reliable solution for semiconductor, lithography, and flat panel manufacturing equipment.

Technical Specifications

Parameter Specification Details
Part Number PT66-0Z-100
Model STP-XA-2703Y
Inlet Flange VG250 (ISO-250F)
Outlet Flange KF-40 (NW40)
Pumping Speed (N2) 2,650 L/s
Bearing System 5-Axis Active Magnetic Levitation
Cooling Method Water Cooled
Mounting Orientation Universal / Any Direction
Compatible Controller Edwards SCU-1400 / SCU-1500 / SCU-1600 Series
Dimensions Approx. 19.8" H x 14.2" Outer Diameter (503 mm x 360 mm)
Weight ~200 lbs (90.7 kg)

Target Applications

  • Semiconductor Wafer Manufacturing (Plasma Etch, Ion Implantation, CVD)

  • Lithography & Photolithography Vacuum Systems

  • Flat Panel Display (FPD) Vacuum Process Tools

  • High-Energy Physics & National UHV Laboratories

$16,275.00
$16,275.00
Shipping calculated at checkout.
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