Edwards STP-iXA4506BV5 Turbomolecular Pump

The Edwards STP-iXA4506BV5 is a ultra-high capacity, magnetically levitated turbomolecular pump featuring a fully integrated controller and power supply unit ("iXA" series). Achieving pumping speeds up to 4,300 L/s, it eliminates external controller racks and interconnect cabling to dramatically save tool footprint. The "BV5" designation indicates an optimized high-throughput rotor configuration with built-in Temperature Management System (TMS) heaters and corrosion-resistant coatings, making it ideal for high-flow, process-heavy semiconductor etch, LCD, and solar thin-film applications.

Technical Specifications

Target Applications

• High-Throughput Semiconductor Plasma Etch & Chemical Vapor Deposition (CVD)

• Large-Area Flat Panel Display (LCD/OLED) Processing

• Solar Cell & Photovoltaic PVD Deposition

• Industrial Glass & Optical Coating