Edwards STP-iXA3306CV Turbo Molecular Pump

This Edwards STP-iXA3306CV turbo molecular pump is a top-of-the-line vacuum solution designed for the most demanding applications, particularly in semiconductor manufacturing and other industries that handle aggressive process gases. Featuring advanced magnetic levitation technology and an integrated controller, it offers industry-leading pumping speeds, oil-free operation, and robust corrosion resistance.

Key Features:

• Magnetic Levitation (MagLev) Technology: The pump utilizes a multi-axis magnetic bearing system, eliminating mechanical wear and the need for lubrication. This results in extremely low vibration levels (typically < 0.02 µm peak-to-peak) and virtually maintenance-free operation.

• High Pumping Speed & Throughput: Offers an impressive pumping speed of 2650 l/s for N₂ and a higher throughput for Ar and H₂, making it ideal for large vacuum chambers and high gas load processes. The 'CV' variant is optimized for corrosive processes.

• Corrosion Resistance (CV Variant): The 'CV' designation signifies enhanced corrosion resistance. This model is specifically constructed with nickel-coated rotors, stators, and internal components to withstand aggressive process gases like chlorine, fluorine, and bromine.

• Oil-Free Operation: Guarantees a hydrocarbon-free vacuum environment, critical for ultra-high vacuum (UHV) applications and processes sensitive to contamination.

• Fully Integrated Onboard Controller: The "iXA" series incorporates the power supply and control unit directly into the pump housing. This compact design eliminates the need for external controllers and interconnecting cables, simplifying installation, reducing footprint, and lowering costs.

• Advanced Digital Control: Features digital 5-axis control for precise operation, self-sensing magnetic bearings, and improved performance compared to previous generations.

• Safety Features: Includes safety backup bearings for protection during power interruptions or air ingress, and advanced diagnostic functions accessible through communication ports.

• Versatile Installation: Can be mounted in any orientation, providing flexibility in system design.

Specifications: