Edwards STP-iXA3305CP Turbomolecular Pump

The Edwards STP-iXA3305CP is a next-generation, high-throughput magnetically levitated turbomolecular pump featuring a fully integrated controller ("iXA" series). Delivering 3,300 L/s class pumping speed, it eliminates the need for a separate rack-mounted controller cabinet, significantly reducing tool footprint and cabling complexity. Engineered for severe chemical process duty ("CP" corrosive variant), it incorporates advanced rotor protection, purge gas management, and optimized thermal control to manage heavy process gas loads in aggressive semiconductor etch and CVD environments.

Technical Specifications

Target Applications

• High-Throughput Semiconductor Plasma Etch & CVD

• Flat Panel Display (FPD) Vacuum Deposition

• Solar Cell Layer Manufacturing

• Harsh Corrosive Chemical Process Gas Handling