Edwards

Edwards STP-F2203C Turbomolecular Pump

Part Number: PT500Z006
Condition: Refurbished
In Stock

The Edwards (Seiko Seiki) STP-F2203C is a high-capacity, magnetically levitated turbomolecular pump engineered for demanding high-throughput semiconductor and thin-film processes. Featuring advanced rotor blade geometry and a 5-axis active magnetic bearing system, it provides hydrocarbon-free high vacuum with zero mechanical friction, ensuring low vibration and maintenance-free continuous operation. The chemical process variant ("C" series) features specialized coatings and corrosive gas protection, making it ideal for aggressive etch, chemical vapor deposition (CVD), and ion implantation applications.

Technical Specifications

Parameter Specification Details
Part Number PT50-0Z-006
Inlet Flange VG250 (ISO-250F)
Outlet Flange KF-40 (NW40)
Pumping Speed (N2) 2,200 L/s
Pumping Speed (H2) 1,200 L/s
Bearing System 5-Axis Active Magnetic Levitation
Rated Speed 27,000 RPM
Cooling Method Water Cooled
Mounting Orientation Any Direction / Universal
Compatible Controller Edwards SCU-1400 / SCU-1500 Series
Dimensions Approx. 18.5" H x 13.8" Outer Diameter (470 mm x 350 mm)
Weight ~134.5 lbs (61 kg)

Target Applications

  • Semiconductor Wafer Manufacturing (Plasma Etch, CVD, PVD, Ion Implantation)

  • Industrial Surface Coating & Thin-Film Deposition

  • Flat Panel Display (FPD) Vacuum Systems

  • Solar & Photovoltaic Cell Production

  • Ultra-High Vacuum (UHV) Research Facilities

$15,495.00
$15,495.00
Shipping calculated at checkout.
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