Edwards STP-A2203LVS Turbomolecular Pump
The Edwards (Seiko Seiki) STP-A2203LVS is a high-performance, magnetically levitated turbomolecular pump engineered for ultra-clean, hydrocarbon-free high-vacuum environments. Built with a 5-axis active magnetic bearing system, it eliminates mechanical friction and oil lubrication, ensuring low vibration, long-term operational stability, and minimal maintenance. The LVS (Low Vibration / Low Spec) configuration is optimized for high-throughput semiconductor wafer processing, scientific research, and sensitive thin-film deposition equipment requiring precision vacuum control and continuous process reliability.
Technical Specifications
| Parameter | Specification Details |
|---|---|
| Part Number | B750-04-090 (B75004090XS) |
| Inlet Flange | VG250 / ISO-250F |
| Outlet Flange | KF-40 (NW40) |
| Pumping Speed (N2) | 2,200 L/s |
| Ultimate Pressure | 1 x 10⁻⁸ Torr (< 1.3 x 10⁻⁶ Pa) |
| Compression Ratio (N2) | > 10⁸ |
| Bearing System | 5-Axis Active Magnetic Levitation |
| Cooling Method | Water Cooled |
| Mounting Orientation | Universal / Any Direction |
| Compatible Controller | Edwards / Seiko Seiki SCU-1400 / SCU-1500 / SCU-1600 Series |
| Dimensions | Approx. 18.5" H x 13.8" Outer Diameter (470 mm x 350 mm) |
| Weight | ~135 lbs (61.2 kg) |
Target Applications
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Semiconductor Wafer Manufacturing (Plasma Etch, Ion Implantation, CVD, PVD)
-
Solar & Photovoltaic Cell Production
-
Flat Panel Display (FPD) Vacuum Systems
-
Thin-Film Deposition & Optical Coating
-
High-Energy Physics & UHV Research Laboratories
- Regular price
- $15,749.00
- Sale price
- $15,749.00
- Regular price
-
- Unit price
- / per
