Edwards

Edwards STP-A1303C Turbomolecular Pump

Part Number: YT36B0120
Condition: New
In Stock

The Edwards (formerly Seiko Seiki) STP-A1303C is a high-capacity, magnetically levitated turbomolecular pump engineered to deliver high pumping performance and hydrocarbon-free vacuum environments. Utilizing a 5-axis active magnetic bearing system, it completely eliminates mechanical contact and oil lubrication, drastically reducing maintenance demands and minimizing vibration. Designed for harsh semiconductor, flat panel display, and industrial coating processes, the STP-A1303C features a chemically aggressive process variant ("C" series) built to handle corrosive process gases and thermal management challenges efficiently.

Technical Specifications

Parameter Specification Details
Part Number YT36-B0-120
Inlet Flange VG200 / ISO-F200 / ICF Flange Options
Exhaust Flange KF40 (NW40)
Pumping Speed (N2) ~1,300 L/s
Bearing System 5-Axis Active Magnetic Levitation
Cooling Method Water Cooled
Mounting Orientation Vertical to Horizontal
Compatible Controller Edwards / Seiko Seiki SCU-1300 / STPC Series Controller
Dimensions Approx. 14.5" H x 11.8" Outer Diameter (368 mm x 300 mm)
Weight ~99 lbs (45 kg)

Target Applications

  • Semiconductor Wafer Manufacturing (Etch, CVD, PVD, Ion Implantation)

  • Solar & Photovoltaic Cell Production

  • Flat Panel Display (FPD) Vacuum Deposition

  • High-Vacuum Surface Coating Systems

  • Ultra-High Vacuum (UHV) Research Facilities

Regular price
$21,500.00
Sale price
$21,500.00
Regular price
Shipping calculated at checkout.
Recommended

You May Also Like

Find essential tools to support every step of semiconductor manufacturing.