Edwards STP-A1303C Turbomolecular Pump
The Edwards (formerly Seiko Seiki) STP-A1303C is a high-capacity, magnetically levitated turbomolecular pump engineered to deliver high pumping performance and hydrocarbon-free vacuum environments. Utilizing a 5-axis active magnetic bearing system, it completely eliminates mechanical contact and oil lubrication, drastically reducing maintenance demands and minimizing vibration. Designed for harsh semiconductor, flat panel display, and industrial coating processes, the STP-A1303C features a chemically aggressive process variant ("C" series) built to handle corrosive process gases and thermal management challenges efficiently.
Technical Specifications
| Parameter | Specification Details |
|---|---|
| Part Number | YT36-B0-120 |
| Inlet Flange | VG200 / ISO-F200 / ICF Flange Options |
| Exhaust Flange | KF40 (NW40) |
| Pumping Speed (N2) | ~1,300 L/s |
| Bearing System | 5-Axis Active Magnetic Levitation |
| Cooling Method | Water Cooled |
| Mounting Orientation | Vertical to Horizontal |
| Compatible Controller | Edwards / Seiko Seiki SCU-1300 / STPC Series Controller |
| Dimensions | Approx. 14.5" H x 11.8" Outer Diameter (368 mm x 300 mm) |
| Weight | ~99 lbs (45 kg) |
Target Applications
-
Semiconductor Wafer Manufacturing (Etch, CVD, PVD, Ion Implantation)
-
Solar & Photovoltaic Cell Production
-
Flat Panel Display (FPD) Vacuum Deposition
-
High-Vacuum Surface Coating Systems
-
Ultra-High Vacuum (UHV) Research Facilities
- Regular price
- $21,500.00
- Sale price
- $21,500.00
- Regular price
-
- Unit price
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