Edwards STP-1003C Turbomolecular Pump

This Edwards STP-1003C turbomolecular pump is a robust and high-performance vacuum solution designed for demanding applications, particularly in the semiconductor industry and other advanced technology fields. The 'C' designation signifies its corrosion-resistant build, making it suitable for processes involving aggressive gases. Its magnetic levitation technology ensures oil-free, low-vibration, and virtually maintenance-free operation.

Key Features:

• Magnetic Levitation (MagLev) Technology: Eliminates mechanical wear and vibration, leading to ultra-low vibration levels (< 0.02 µm peak-to-peak typical), extended pump life, and significantly reduced maintenance requirements.

• Corrosion Resistance (C Version): Features special anti-corrosion treatments (e.g., nickel-coated rotors and stators) making it ideal for processes involving harsh gases like chlorine, fluorine, and bromine found in semiconductor etching and deposition.

• High Pumping Speed: Delivers an impressive pumping speed of 1000 l/s for N₂ and 800 l/s for H₂, ensuring rapid and efficient evacuation of large vacuum chambers.

• Oil-Free Operation: Guarantees a hydrocarbon-free vacuum, critical for high-purity applications in semiconductor manufacturing, surface analysis, and scientific instrumentation.

• Versatile Installation: Can be installed in any orientation, offering flexibility in system design and integration.

• Advanced Safety Features: Equipped with backup mechanical bearings for protection during power failures or sudden air ingress.

• Wide Application Range: Suitable for semiconductor processes (plasma etch, CVD, sputtering), ion implantation, beamline pumping, mass spectrometry, and electron microscopy.

Specifications: