Edwards / Seiko Seiki STP-603 Turbomolecular Vacuum Pump

The Edwards / Seiko Seiki STP-603 is a medium-capacity, magnetically levitated (Maglev) turbomolecular vacuum pump engineered for high-reliability industrial, analytical, and semiconductor process applications. Featuring a 5-axis active magnetic bearing suspension system, the STP-603 delivers hydrocarbon-free UHV performance with zero oil backstreaming and minimal operational vibration.

The pump utilizes active rotor position monitoring and dynamic magnetic balancing to ensure smooth acceleration and rotational stability up to 35,000 RPM. Standard models feature high compression profiles for UHV research, while "C"variants (STP-603C) incorporate protective internal nickel coatings and dedicated purge gas channels designed to resist corrosive process environments.

Technical Specifications

Key Features & Lab Benefits

• Hydrocarbon-Free Vacuum: Active 5-axis magnetic bearings completely suspend the rotor, eliminating mechanical oil lubrication and preventing system contamination in sensitive vacuum chambers.

• Low-Vibration Operation: Active magnetic balancing dynamically compensates for minor rotor imbalances, delivering low operational vibration for beamline, electron microscopy, and surface analysis tools.

• Corrosive Gas Protection ("C" Series): Corrosion-resistant variants (STP-603C) feature internal surface plating and dedicated purge channels to protect coil assemblies from aggressive etch and CVD process chemistries.

• Omnidirectional Mounting: Magnetically supported rotor system allows installation in horizontal, vertical, or inverted orientations.