Edwards / Seiko Seiki SCU-1600 LON Turbomolecular Pump Controller

The Edwards / Seiko Seiki SCU-1600 LON (Part Number: YT76-Z2-Z20) is a fully digital, high-capacity turbomolecular pump control unit designed specifically for large-class, 5-axis magnetically levitated (mag-lev) STP turbo pumps (ranging from 2,000 L/s to 4,500 L/s).

Featuring built-in LonWorks (LON) network communication, this controller is tailored for high-density semiconductor tool integration, allowing automated multi-pump control, remote telemetry reporting, and streamlined tool networking. It includes advanced predictive maintenance algorithms, built-in Temperature Management System (TMS) support, and active vibration suppression to maximize process uptime.

Key Features & Benefits

• LonWorks (LON) Fieldbus Integration: Enables seamless multi-node industrial network communication directly with host semiconductor process equipment.

• Universal High-Capacity Support: Engineered to drive large-capacity mag-lev STP-series pumps (2,000 to 4,500 L/s class).

• Active Magnetic Levitation & Tuning: Digitally regulates 5-axis active magnetic bearings to eliminate physical bearing friction and reduce rotor vibration.

• Advanced Predictive Maintenance: Tracks rotor imbalance, backup bearing wear limits, and thermal thresholds to warn operators before unexpected tool downtime occurs.

• Integrated TMS Controller: Built-in Temperature Management System driver prevents corrosive process gas condensation inside the pump chamber.

Technical Specifications

Typical Applications

• High-Density Semiconductor Etch, CVD, and Implantation

• Flat Panel Display (FPD) and Solar Cell Production

• Extreme High-Vacuum (XHV) and Large-Chambers R&D

• Multi-Pump Automated Tool Interfaces via LonWorks Network