Edwards / Seiko Seiki SCU-1400 Turbomolecular Pump Controller

The Edwards / Seiko Seiki SCU-1400 (Part Number: YT72Z0Z00) is a universal, high-capacity control unit designed for 5-axis magnetically levitated (mag-lev) turbomolecular vacuum pumps. Built to operate mid-to-large capacity STP-series pumps, the SCU-1400 handles dynamic magnetic bearing levitation, automatic rotor balancing, and motor speed control for hydrocarbon-free, ultra-high-vacuum (UHV) processes.

Equipped with an Auto Vibration Reduction (AVR) system and comprehensive self-diagnostics, the SCU-1400 ensures exceptional thermal stability, reduced noise, and continuous operation in demanding semiconductor manufacturing, thin-film deposition, and surface science environments.

Key Features & Benefits

• Universal Compatibility: Drives a wide variety of 300 L/s to 2200+ L/s class mag-lev STP turbo pumps.

• Active Magnetic Bearing Management: Uses 5-axis active magnetic levitation to eliminate mechanical bearing friction, extending pump life and reducing vibration.

• Auto Vibration Reduction (AVR) & Dynamic Balancing: Minimizes mechanical noise and resonance transferred to the vacuum chamber.

• Self-Diagnostics & Fault Isolation: Monitors levitation status, temperature thresholds, rotor speed, and line power parameters to prevent pump damage.

• Flexible I/O Integration: Includes remote parallel and serial communication ports for integration into automated tool controllers.

Technical Specifications

Typical Applications

• Semiconductor Etch, CVD, and PVD Equipment

• Flat Panel Display (FPD) and Solar Cell Production

• Mass Spectrometry & High-Energy Surface Analysis

• General UHV Research Chambers and Space Simulation Systems