Edwards

Edwards SCU-350HA Turbomolecular Pump Controller

Part Number: YT21ZDZ10
Condition: Refurbished
In Stock

The Edwards SCU-350HA (Part Number: YT21-ZD-Z10) is a compact, high-efficiency digital controller specifically built to drive Edwards and Seiko Seiki magnetically levitated turbomolecular pumps. Featuring digital 5-axis magnetic bearing management, auto-tuning, and extensive real-time diagnostics, it provides high stability and low vibration operation. The SCU-350HA is equipped with versatile serial and parallel communication interfaces for seamless tool integration across automated semiconductor production lines.

Technical Specifications

Parameter Specification Details
Part Number YT21-ZD-Z10
Model SCU-350HA
Manufacturer Edwards Vacuum / Seiko Seiki
Compatible Pumps Edwards STP-301 / STP-451 / STP-A350 Series
Input Voltage 100–240 VAC, 1-Phase, 50/60 Hz
Drive System 5-Axis Active Magnetic Bearing Drive & Motor Frequency Inverter
Interface Options RS-232C / Parallel I/O / Remote Relay Status
Dimensions Approx. 5.0" H x 8.5" W x 14.0" D (128 mm x 216 mm x 355 mm)
Weight ~17.6 lbs (8 kg)

Target Applications

  • Semiconductor Wafer Processing Tools (Etch, CVD, Ion Implantation)

  • Industrial Surface Coating & Optical Deposition

  • Photovoltaic & Solar Cell Vacuum Systems

  • UHV Physics Chambers & Accelerators

$5,195.00
$5,195.00
Shipping calculated at checkout.
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