Edwards SCU-STP-H1000C Turbomolecular Pump

The Seiko Seiki / Edwards STP-H1000C is a high-performance, magnetically levitated turbomolecular pump engineered for ultra-clean, hydrocarbon-free high-vacuum environments. Built with a 5-axis active magnetic bearing suspension system, it completely eliminates physical contact and oil lubrication, providing low vibration and long-term operational stability. The "H" (High-Throughput) series combined with the "C" (Corrosive Process) variant features internal protective coatings, elevated rotor temperature capability, and purge gas management designed to handle heavy process gas loads in aggressive semiconductor etch and deposition tools.

Technical Specifications

Target Applications

• Semiconductor Wafer Fabrication (Plasma Etch, CVD, PECVD, PVD)

• Solar & Photovoltaic Cell Manufacturing

• Flat Panel Display (FPD) Vacuum Deposition

• Industrial Thin-Film Coating & Vacuum Metallurgy

• Ultra-High Vacuum (UHV) R&D Research Facilities