Edwards

Edwards SCU-1003C Turbomolecular Pump Controller

Part Number: SCU1003C
Condition: Refurbished
In Stock

The Seiko Seiki / Edwards SCU-1003C is a high-performance digital controller engineered to drive and levitate the STP-1003C series magnetically levitated turbomolecular pumps. Built around a 5-axis active magnetic bearing suspension system, it manages motor rotation, levitation, and dynamic rotor balance with zero mechanical friction or oil contamination. The "C" designation indicates built-in support for corrosive gas process variants, incorporating automatic protective logic against gas surge overloads, power dropouts, and thermal anomalies in aggressive semiconductor and industrial vacuum environments.

Technical Specifications

Parameter Specification Details
Model / Part Number SCU-1003C
Manufacturer Seiko Seiki / Edwards Vacuum
Compatible Pump Edwards / Seiko Seiki STP-1003C / STP-A1003C Series
Drive Architecture 5-Axis Magnetic Levitation & Motor Inverter Drive
Input Voltage 200–240 VAC, 1-Phase, 50/60 Hz
Interface Options RS-232C Serial, Remote Parallel I/O, Status Relay Interlocks
Cooling Method Forced Air / Internal Fan
Enclosure Format 19" Rack-Mount Chassis / Benchtop
Dimensions Approx. 5.9" H x 17.0" W x 15.5" D (150 mm x 432 mm x 394 mm)
Weight ~31 lbs (14 kg)

Target Applications

  • Semiconductor Wafer Manufacturing (Plasma Etch, CVD, PVD)

  • Industrial Thin-Film Coating & Optical Deposition

  • Flat Panel Display (FPD) Vacuum Platforms

  • OEM Controller Replacement & Retrofitting

  • High-Vacuum University & R&D Laboratories

$4,195.00
$4,195.00
Shipping calculated at checkout.
Recommended

You May Also Like

Find essential tools to support every step of semiconductor manufacturing.
Need help finding the Right Product? >> Contact Us Find the Right Product >> Contact Us