Ebara ET 600 WS Turbomolecular Vacuum Pump

The Ebara ET 600 WS is an industrial-grade, water-cooled turbomolecular vacuum pump engineered to provide clean, reliable, high-speed evacuation for demanding semiconductor manufacturing, thin-film deposition, and complex laboratory R&D applications. Delivering a robust pumping speed of $600\text{ L/sec}$ for Nitrogen (N2), this high-vacuum pump utilizes a high-efficiency rotor design operating at $35,000\text{ RPM}$ to achieve exceptional compression ratios and ultra-low ultimate pressures.

Built for maximum durability in harsh environments, the ET 600 WS features high-load bearing structures and an integrated water-cooling manifold. This design manages heavy thermal loads effectively, ensuring structural integrity and preventing process-gas condensation during continuous high-throughput operations.

Technical Specifications

Key Features & Benefits

• High Process Throughput: Optimized blade geometry provides a $600\text{ L/sec}$ volumetric speed, ideal for rapid chamber cycling and continuous chemical gas loads.

• Advanced Thermal Management: Heavy-duty water-cooling framework allows the pump to tolerate high back-stream pressures and intense process radiation without overheating.

• Ultra-Clean Vacuum Performance: Precision mechanical tolerances allow the pump to achieve ultimate pressures in the 10−9 Torr range, minimizing hydrocarbons or residual process contaminants.

• Flexible Mounting Orientation: Engineered structural balance allows the pump to be mounted in any spatial orientation required by the tool layout.