CTI-Cryogenics On-Board WP 1050 Vacuum Waterpump

The CTI-Cryogenics On-Board WP 1050 (System Part Number: 8129965G001SYS) is a specialized, high-capacity vacuum waterpump designed specifically for the rapid trapping and selective pumping of water vapor (H2O) in production-scale semiconductor, flat-panel display, and optical coating vacuum systems.

Operating as part of CTI's On-Board (OB) architecture, the WP 1050 integrates a high-surface-area meander/cryopanel array with automated microprocessor-controlled regeneration. It traps water vapor at cryogenic temperatures without requiring liquid nitrogen (LN2), delivering extremely high water vapor pumping speeds to dramatically lower chamber pumpdown times and boost overall process tool throughput.

Key Features & Benefits

• Dedicated Water Vapor Pumping: High-conductance cryopanel design selectively pumps water vapor at speeds exceeding standard broad-gas cryopumps of comparable footprint.

• Integrated On-Board Electronics: Features CTI’s microprocessor-controlled module for automated regeneration, temperature tracking, diagnostic monitoring, and seamless fieldbus integration with host semiconductor tools.

• Hydrocarbon-Free Operation: Closed-loop helium refrigeration ensures clean, dry vacuum execution without risk of oil contamination in sensitive process chambers.

• Flexible Mounting: Mounts directly to high-vacuum gate valves or chamber ports in any spatial orientation without affecting thermal performance.

• System Configuration (SYS Suffix): Delivered as a complete assembly setup including the cold head/vessel, integrated On-Board control module, and internal sensor network.

Technical Specifications