CTI-Cryogenics On-Board 8F Low-Profile High-Vacuum Cryopump

The CTI-Cryogenics On-Board 8F (Part Number: 8112891G002) is an 8-inch low-profile ("Flat") cryogenic vacuum pump engineered for space-constrained semiconductor, sputtering, and thin-film deposition tools. By mounting the cold head horizontally/side-mounted relative to the inlet flange, the 8F variant significantly reduces vertical envelope requirements while maintaining full 8-inch high-vacuum performance.

This configuration features an integrated microprocessor-driven On-Board (OB) module, providing fully automated regeneration, real-time temperature telemetry, and integrated sensor management without requiring external standalone temperature monitors.

Key Features & Benefits

• Low-Profile (Flat) Geometry: Horizontal vessel design ideal for tight tool side-ports and bottom-mount chamber configurations where vertical clearance is limited.

• Automated On-Board Control: Integrated electronic module manages automated regeneration cycles, purge/roughing interlocks, and continuous thermal diagnostics.

• Hydrocarbon-Free Vacuum: Traps water vapor, argon, nitrogen, and hydrocarbons cryogenically to deliver clean ultra-high vacuum (<1.0×10−8 Torr).

• Proven ISO / ANSI Flange Interface: Heavy-duty flange construction for reliable, high-vacuum sealing on production-scale process chambers.

• Flexible Tool Integration: Direct network interface capability for centralized tool control and remote telemetry monitoring.

Technical Specifications