CTI-Cryogenics On-Board 8 High-Vacuum Cryopump

The CTI-Cryogenics On-Board 8 (Part Number: 8112873G001R) is a standard vertical 8-inch cryogenic vacuum pump designed for high-performance ultra-high vacuum (UHV) applications, semiconductor wafer processing, optical coating, and precision research chambers.

Featuring CTI's integrated On-Board (OB) microprocessor architecture, this pump provides automated regeneration sequences, integrated thermal monitoring via silicon diodes, and direct digital communication for centralized host-tool integration. The R suffix designates an OEM-standard reconditioned or factory-rebuilt exchange unit certified to original performance specifications.

Key Features & Benefits

• Microprocessor-Driven On-Board Control: Eliminates the need for external standalone temperature monitors by incorporating automated regeneration, valve control, and sensor management directly on the pump module.

• Clean, Hydrocarbon-Free Ultra-High Vacuum: Traps gases cryogenically to achieve base pressures below 1.0×10−8 Torr without oil contamination risks.

• Optimized Vertical Footprint: Standard vertical cold-head vessel configuration optimized for bottom- or top-mounting directly beneath high-vacuum isolation valves.

• Automated Regeneration Sequences: Supports fully automated fast-warmup and purge cycles to minimize tool maintenance downtime and maximize operational uptime.

• Standard 8-Inch Flange Interface: Compatible with industry-standard ANSI, ISO, and ConFlat (CF) flange patterns for broad system compatibility.

Technical Specifications